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Wet Clean Equipment (Ipms-Cnt08.1) Tender in Germany - 114548617

The FRAUNHOFER-GESELLSCHAFT - EINKAUF B12 has issued a Tender notice for the procurement of a Wet Clean Equipment (Ipms-Cnt08.1) - Pr866707-2480-P in the Germany. This Tender notice was published on 11 Feb 2025 and is scheduled to close on 13 Mar 2025, with an estimated Tender value of Refer Document. Interested bidders can access detailed Tender information, eligibility criteria, and complete bidding documents by referencing TOT Ref No. 114548617, while the tender notice number is 91639-2025 and Registering on the platform.

Expired Tender

Procurement Summary

Country: Germany

Summary: Wet Clean Equipment (Ipms-Cnt08.1) - Pr866707-2480-P

Deadline: 13 Mar 2025

Posting Date: 11 Feb 2025

Other Information

Notice Type: Tender

TOT Ref.No.: 114548617

Document Ref. No.: 91639-2025

Competition: ICB

Financier: Self Financed

Purchaser Ownership: Public

Tender Value: Refer Document

CPV Classification

42990000 - Miscellaneous special-purpose machinery

Purchaser's Detail

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Tender Details

1 WET Clean Equipment: Single Wafer Clean (SWC) Tool Subject of the tender is of a piece of equipment for cleaning and wet etching wafers with a diameter of 300 mm with liquid based chemicals in a single wafer mode (SWC). The system can process at least two hardware separated protocol zones simultaneously. The following process media should be available: dHF, SC1, SC2, dHCl, O3DIW, SPM, Aqua regia, AOM, FOM; HOM Optionale Leistungspositionen: 6.1.1Optional requirements and equipmentPlease offer a unit for saving/recycling/re-use of hot-DIW waste water heat in the mean of energy savingplease specify 6.1.2Optional requirements and equipmentPlease offer a Aqua regia dilution unit for diluting AR wasteplease specify 6.1.3Optional requirements and equipmentPlease offer an online recipe management solution (hardware & software)please specify 6.1.4Optional requirements and equipmentPlease offer a source inspectionplease specify 6.1.5Optional requirements and equipmentWarranty extension for a further year.please specify 6.1.6Optional requirements and equipmentEnergy consumption recording system (e.g. electricity meter)please specify
Doc Title: WET Clean Equipment (IPMS-CNT08.1) - PR866707-2480-P
Contract Type: supplies
Document Type: Contract Notice

Reference Number: PR866707-2480-P

Contract Type: supplies

Authority Type: pub-undert

Doc Title: WET Clean Equipment (IPMS-CNT08.1) - PR866707-2480-P

Dispatch Date: 2025-02-10

Publish Date: 2025-02-11

Submission Date: 2025-03-13

Documents

 Tender Notice


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