Supply, Installation and Commissioning Tender in Spain - 145596212

Procurement Summary

Country: Spain

Summary: Supply, Installation and Commissioning of an Electron Beam Lithography Tool up to 8-Inch Wafers (Upv04) and a Sem Equipment (Upv13) for the Pilot Line of the Upv

Deadline: 15 Sep 2026

Posting Date: 21 Jul 2026

Other Information

Notice Type: Tender

TOT Ref.No.: 145596212

Document Ref. No.: 504178-2026

Competition: ICB

Financier: Self Financed

Purchaser Ownership: Public

Tender Value: EUR 4242784

CPV Classification

31712110 - Electronic integrated circuits and microassemblies

Purchaser's Detail

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Tender Details

Supply, installation and commissioning of an Electron Beam Lithography tool up to 8-inch wafers (UPV04) and a SEM equipment (UPV13) for the Pilot Line of the UPV The contracting that is the subject of this file is necessary in order to carry out carry out research and development work for the UPV Pilot Line, with the aim of improving existing advanced pilot lines and developing new ones throughout the Union, to allow the development and deployment of semiconductor technologies of cutting-edge and next-generation semiconductor technologies. To this end, it is necessary to proceed with the acquisition, among others, of the following equipment: 4 • UPV04 - Electron beam lithography tool up to 8-inch wafers: Beam lithography equipment electron beam that exposes patterns on sensitive resistors using a focused and scanned electron beam. Write features with nanometer resolution according to design in digital file. Dedicated to nanomanufacturing pattern, especially for masks and structures in photonics, semiconductors and nanotechnology. • UPV13 - SEM: Surface inspection equipment using a focused electron beam that delivers nanometric resolution images. It allows obtaining morphological and surface contrast, as well as contrast associated with differences in composition or atomic number, depending on the detectors and imaging modes available. Dedicated to metrology, inspection and validation of...
Document Type: Contract Notice Reference Number: MY26/ITEAM/S/55 Contract Type: supplies Estimated Value: 4242784 - EUR Authority Type: body-pl-ra Doc Title: Suministro, instalación y puesta en funcionamiento de un equipo Electron Beam Lithography tool up to 8-inch wafers (UPV04) and an SEM equipment (UPV13) for the UPV Pilot Line Dispatch Date: 2026-07-20 Publish Date: 2026-07-21 Submission Date: 2026-09-15

Documents

 Tender Notice