La3215c-Ucc-Cft for the Supply of a Suite Tender - 145189303

Procurement Summary

Country: Ireland

Summary: La3215c-Ucc-Cft for the Supply of a Suite of Plasma Etcher and Plasma Deposition Tools, 4 Lots

Deadline: 24 Jul 2026

Posting Date: 15 Jul 2026

Other Information

Notice Type: Tender

TOT Ref.No.: 145189303

Document Ref. No.: 488696-2026

Competition: ICB

Financier: Self Financed

Purchaser Ownership: Public

Tender Value: EUR 3300000

CPV Classification

38000000 - Laboratory, optical and precision equipments (excl. glasses)

Purchaser's Detail

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Tender Details

Plasma Etcher, Silicon, Dielectrics Plasma Etcher, Metals, Piezoelectrics Plasma Etcher, Slow and Controllable Rate, Atomic Layer Etch for Silicon, Dielectrics Plasma Deposition, PECVD
Tenders are sought for the supply delivery, installation and commissioning of a suite of tools in 4 Lots for silicon-based and dielectric materials for University College Cork. The new plasma tools will enhance the capabilities at the Tyndall National Institute for the fabrication of semiconductor devices, especially silicon microelectronics and silicon MEMS, but also other materials such as germanium and silicon carbide. We invite proposals for the following lots; Lot 1 Plasma Etcher Silicon Dielectrics, advanced plasma etching system capable of etching for polysilicon poly-Si silicon dioxide SiO2 silicon nitride SiN thin films using medium high-density plasma processes. Lot 2 Plasma Etcher Metals Piezoelectrics, advanced plasma etching system capable of etching for aluminium Al and alloys molybdenum Mo aluminium scandium nitride AlScN thin films using medium high-density plasma processes. Lot 3 Plasma Etcher Slow and Controllable Rate Atomic Layer Etch for Silicon Dielectrics, advanced plasma etching system capable of both conventional high-rate etching and slow and controllable rate atomic layer etching for silicon Si silicon dioxide SiO2 silicon nitride SiN thin films using medium high-density plasma processes. Lot 4 Plasma Deposition PECVD, advanced plasma enhanced chemical vapour dep...
Document Type: Contract Notice

Contract Type: supplies

Estimated Value: 3300000 - EUR

Authority Type: body-pl

Doc Title: LA3215C-UCC-CFT for the Supply of a Suite of Plasma Etcher and Plasma Deposition Tools, 4 Lots

Dispatch Date: 2026-07-13

Publish Date: 2026-07-15

Submission Date: 2026-07-24

Documents

 Tender Notice