Contract notice: Laboratory, optical and precision equipments (excl. glasses) Tender

Procurement Summary

Country : Ireland

Summary : Contract notice: Laboratory, optical and precision equipments (excl. glasses)

Deadline : 14 Oct 2019

Other Information

Notice Type : Tender

TOT Ref.No.: 36379778

Document Ref. No. : 435511-2019

Competition : ICB

Financier : Self Financed

Purchaser Ownership : -

Tender Value : Refer Document

Purchaser's Detail

Purchaser : EDUCATION PROCUREMENT SERVICE (EPS)
Office Name: Education Procurement Service (EPS)
Address: University of Limerick, Co. Limerick
Town: Castletroy

Contact Point: Eimear Brennan

Phone: +353 61234901
Ireland
Email :eimear.brennan@ul.ie
URL :http://www.educationprocurementservice.ie

Tender Details

Object of the contract
Laboratory, optical and precision equipments (excl. glasses)

Description: Contract notice: Laboratory, optical and precision equipments (excl. glasses)

Authority Type: Body governed by public law
Contact Nature: Supplies
Procedure: Open procedure
Document: Contract notice
Regulation: European Union
Award criteria: The most economic tender
CPV code: 38000000, 31712330, 38410000, 38420000, 38430000, 38432000, 38653300, 38654000, 38654100, 38000000, 31712330, 38410000, 38420000, 38430000, 38432000, 38653300, 38654000, 38654100
CPV Description: Laboratory, optical and precision equipments (excl. glasses).

Semiconductors.

Metering instruments.

Instruments for measuring flow, level and pressure of liquids and gases.

Detection and analysis apparatus.

Analysis apparatus.

Apparatus and equipment for developing film.

Microfilm and microfiche equipment.

Microfilm equipment.

UCC — RFT a Plasma Chemical Vapour Deposition System for Compound Semiconductors for the Tyndall National Institute

Reference Number : LEE701C

Tenders are sought for the supply, delivery and installation of a plasma chemical vapour deposition system for compound semiconductors for the Tyndall National Institute, UCC.

Tenders are sought for the supply, delivery and installation of a plasma chemical vapour deposition system for compound semiconductors for the Tyndall National Institute, UCC.

The process and product development laboratories at Tyndall National Institute, UCC, fabricate a wide variety of semiconductor devices, ranging from traditional silicon microelectronics and Silicon MEMS to III-V photonic devices. We wish to extend our capability in the area of plasma deposition by purchasing a fully functional load locked PECVD (plasma enhanced chemical vapour deposition) or ICPCVD (Inductively coupled plasma chemical vapour deposition) system including pumps which will allow us to move our processing to a higher TRL level in terms of substrate size, deposition processes and control. The system offered must be suitable for use in a class 1 000 cleanroom. As much of the work is in the area of semiconductor R&D we have a requirement for a system that can handle substrates of varying sizes from 10 x 10 mm and various irregular shaped pieces through to 200 mm wafers, including 50 mm, 100 mm and 150 mm wafers. Due to the novel nature of the R&D and customer base we also require that the system be able to deposit a variety of film materials from dielectrics SiO2 (silicon dioxide), Si3N4 (silicon nitride) and SiOxNy (silicon oxynitride) to amorphous silicon and SiC (silicon carbide). We have defined the technical specification in terms of these specific film materials and also for the use of TEOS (Tetraethylorthosilicate) liquid precursor for conformal SiO2 deposition and the specific requirement for low temperature deposition of SiO2 and Si3N4 as well as these materials at the more standard deposition temperature of 300 C. The tenderer should also supply as part of the tender response details of the recipes to be used for cleaning when changing between deposition materials. The tender response must clearly show the costs for all items and any additional options must be clearly identified as such and costed separately. As part of

Please see RFT document for further details.

Please see RFT document for further details.


Internet address (URL): http://www.educationprocurementservice.ie

Documents

 Tender Notice