Combined Icp-Drie Equipment and Spectrophotometer Tender - 130530626

Procurement Summary

Country: Spain

Summary: Combined Icp-Drie Equipment and Spectrophotometer for "In Situ" Photoluminescence

Deadline: 04 Dec 2025

Posting Date: 20 Nov 2025

Other Information

Notice Type: Tender

TOT Ref.No.: 130530626

Document Ref. No.: 769926-2025

Competition: ICB

Financier: Self Financed

Purchaser Ownership: Public

Tender Value: EUR 375000

CPV Classification

31712100 - Microelectronic machinery and apparatus

Purchaser's Detail

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Tender Details

The DRIE (Deep Reactive Ion Etching) technique consists of the deep and highly precise etching of semiconductor materials, such as silicon, using a reactive plasma process. This method allows the creation of three-dimensional structures with vertical profiles and high aspect ratio, which is essential in the manufacturing of photonic and microelectromechanical (MEMS) devices. Currently, the NTC works on the manufacture of photonic devices, but does not have a technique that allows deep engravings to be carried out with the precision and control that DRIE offers. The implementation This technique would allow the quality and functionalities of the manufactured components to be significantly improved, opening new possibilities in the design and manufacturing of advanced devices.
The photoluminescence spectroscopy technique, integrated directly into the camera of a device of ICP-DRIE will allow precise and real-time analysis of the optical properties of the samples and the geometry of the structures during the etching process. It also guarantees high sensitivity and spectral resolution, facilitating the measurement of low intensity signals and improving monitoring capabilities in advanced applications.
Its implementation ensures compatibility with standard detection systems and offers flexibility in the experimental configuration, which reinforces the versatility of the equipment for materials research and development. semiconduct...
Document Type: Contract Notice

Reference Number: MY25/IUTNA/S/75

Contract Type: supplies

Estimated Value: 375000 - EUR

Authority Type: body-pl-ra

Doc Title: Equipo combinado ICP-DRIE y espectrofotometro para fotoluminiscencia "in situ"

Dispatch Date: 2025-11-19

Publish Date: 2025-11-20

Submission Date: 2025-12-04

Documents

 Tender Notice