Home » Tenders » Europe » Belgium » Tender 86064052

A 300mm Wafer Compatible, Multi-chamber Pvd Tender - 86064052

The IMEC VZW has issued a Tender notice for the procurement of a A 300mm Wafer Compatible, Multi-chamber Pvd Platform in the Belgium. This Tender notice was published on 21 Jul 2023 and is scheduled to close on 21 Aug 2023, with an estimated Tender value of Refer Document. Interested bidders can access detailed Tender information, eligibility criteria, and complete bidding documents by referencing TOT Ref No. 86064052, while the tender notice number is IMEC VZW-300 MM WAFER-COMPATIBEL PVD-PLATFORM MET MEERDERE KAMERS -F02 and Registering on the platform.

Procurement Summary

Country: Belgium

Summary: A 300mm Wafer Compatible, Multi-chamber Pvd Platform

Deadline: 21 Aug 2023

Posting Date: 21 Jul 2023

Other Information

Notice Type: Tender

TOT Ref.No.: 86064052

Document Ref. No.: IMEC VZW-300 MM WAFER-COMPATIBEL PVD-PLATFORM MET MEERDERE KAMERS -F02

Competition: ICB

Financier: Self Financed

Purchaser Ownership: Public

Tender Value: Refer Document

Purchaser's Detail

Name: Login to see tender_details

Address: Login to see tender_details

Email: Login to see tender_details

Tender Details

Greater than, or equal to, 9 process chambers must be supported on a single platform. These modules, including any robot transfer modules, must be capable of ultra-high vacuum (/= 4) PVD chamber with a combination of RF and/or DC and/or pulsed DC cathodes capable of a minimum of 2-target co-sputtering with high-temperature heating capability, 2) a pre-clean chamber to remove native oxides and other contaminants, 3) in-situ high temperature anneal chamber (600C) capable of injecting reactive gases e.g. O2 and N2, 4) single-cathode PVD chamber with heating capability capable of high deposition rates (1nm/s) and, 5) cooling chamber (100k). the platform must be compatible with front opening universal pods with a 25-slot capacity, including an equipment front end module and load-lock system for wafer loading. finally, the deposition must be computer controlled and automated following defined recipes. as an optional, the platform should be compatible with automatic recipe upload from fab management software via a standardized protocol, for example secs/gem
Type de procédure : Competitive procedure with negotiation

Contract type : Supplies

Tenders submission deadline : 21/08/2023

Documents

Tender Notice

Browse More

All Tenders From Belgium

All Tenders From Europe

Procurement Documents for Belgium

Access a comprehensive library of standard procurement documents specific to Belgium. Here, you'll find all the essential forms, guidelines, and templates required for tender applications and submissions in Belgium

Explore Procurement Documents for Belgium

Want To Bid in This Tender?

Get Local Agent Support in Belgium and 60 More Countries.

View All The Services

View Tenders By