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FRAUNHOFER-GESELLSCHAFT - EINKAUF B12 has floated a tender for Wet Clean Equipment (Ipms-Cnt08.1) - Pr866707-2480-P. The project location is Germany and the tender is closing on 13 Mar 2025. The tender notice number is 91639-2025, while the TOT Ref Number is 114548617. Bidders can have further information about the Tender and can request the complete Tender document by Registering on the site.
Procurement Summary
Country : Germany
Summary : Wet Clean Equipment (Ipms-Cnt08.1) - Pr866707-2480-P
Deadline : 13 Mar 2025
Other Information
Notice Type : Tender
TOT Ref.No.: 114548617
Document Ref. No. : 91639-2025
Financier : Self Financed
Purchaser Ownership : Public
Tender Value : Refer Document
Purchaser's Detail
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Login to see detailsTender Details
1 WET Clean Equipment: Single Wafer Clean (SWC) Tool Subject of the tender is of a piece of equipment for cleaning and wet etching wafers with a diameter of 300 mm with liquid based chemicals in a single wafer mode (SWC). The system can process at least two hardware separated protocol zones simultaneously. The following process media should be available: dHF, SC1, SC2, dHCl, O3DIW, SPM, Aqua regia, AOM, FOM; HOM Optionale Leistungspositionen: 6.1.1Optional requirements and equipmentPlease offer a unit for saving/recycling/re-use of hot-DIW waste water heat in the mean of energy savingplease specify 6.1.2Optional requirements and equipmentPlease offer a Aqua regia dilution unit for diluting AR wasteplease specify 6.1.3Optional requirements and equipmentPlease offer an online recipe management solution (hardware & software)please specify 6.1.4Optional requirements and equipmentPlease offer a source inspectionplease specify 6.1.5Optional requirements and equipmentWarranty extension for a further year.please specify 6.1.6Optional requirements and equipmentEnergy consumption recording system (e.g. electricity meter)please specify
Doc Title: WET Clean Equipment (IPMS-CNT08.1) - PR866707-2480-P
Contract Type: supplies
Document Type: Contract Notice
Reference Number: PR866707-2480-P
Contract Type: supplies
Authority Type: pub-undert
Doc Title: WET Clean Equipment (IPMS-CNT08.1) - PR866707-2480-P
Dispatch Date: 2025-02-10
Publish Date: 2025-02-11
Submission Date: 2025-03-13
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