Procurement Summary
Country : Germany
Summary : Trockenaetzcluster - Pr624203-2790-Wen
Deadline : 08 Mar 2024
Other Information
Notice Type : Tender
TOT Ref.No.: 96719648
Document Ref. No. : 85386-2024
Competition : ICB
Financier : Self Financed
Purchaser Ownership : Public
Tender Value : Refer Document
Purchaser's Detail
Purchaser : FRAUNHOFER SOCIETY - PURCHASING B12
Address: Hansastrasse 27c
Town: Munich
NUTS Code: DE212
Postal Code: 80686
Attn: Purchasing Scientific Equipment
Phone: 49891205-0
Germany
Email :einkauf@zv.fraunhofer.de
URL :https://vergabe.fraunhofer.de/
Tender Details
Dry etching cluster
Dry etching cluster - PR624203-2790-W
1 piece dry etching cluster with options:
4.4 Deposition of poly/α-silicon and TEOS layers
5.1.4 Etching of other metals (such as Pt, Hf, W, Ge, Ni, silicided Ni) Description of which other metals are etched in the present configurationcan be
6.4.7 Anisotropic etching of SiO2 and Si3N4
Doc Title: Dry etching cluster - PR624203-2790-W
Contract Type: supplies
Document Type: Contract Notice
Reference Number: PR624203-2790-W
Contract Type: supplies
Authority Type: pub-undert
Doc Title: Trockenaetzcluster - PR624203-2790-W
Dispatch Date: 2024-02-07
Publish Date: 2024-02-09
Submission Date: 2024-03-08
Documents
Tender Notice