Procurement Summary
Country : Germany
Summary : Procurement of a Dedicated Electron Beam Lithography System
Deadline : 25 Apr 2024
Other Information
Notice Type : Tender
TOT Ref.No.: 99266183
Document Ref. No. : 176510-2024
Competition : ICB
Financier : Self Financed
Purchaser Ownership : Public
Tender Value : EUR 1300000.00
Purchaser's Detail
Purchaser : LUDWIG-MAXIMILIANS-UNIVERSITY MUNICH
Address: Zwilling-Scholl-Platz 1
Town: Munich
NUTS code: DE212
Postal code: 80539
Phone: 49 8921803733
Germany
Email :philipp.altpeter@lmu.de
URL :https://www.deutsche-evergabe.de
Tender Details
The award procedure described here concerns the procurement of a dedicated electron beam lithography system for the nanoscale structuring of thin polymer films using electrostatic scanning of a focused, high-energy electron beam for two-dimensional researchMaterials in quantum physics experiments.
Procurement of a dedicated electron beam lithography system
The nanoscale structuring of quantum devices is required for the spatial localization of quantum physics phenomena. The lateral resolution power of optical methodsren is severely limited by the wavelength of the light in refractive optics and its diffraction behavior, which is why alternative methods are used. Electron beam lithography (hereinafter abbreviated as EBL, English Electron Beam Lithography) is of particular importance here becauseIn addition to an extremely high resolution of potentially a few nanometers, relatively short exposure times and a high compatibility with material systems used in quantum technology, it integrates very well into process sequences with photolithographically pre-structured samplescan be varied (mix and match).
As part of the Munich Quantum Valley Initiative, the Efetov Chair, Ludwig Maximilian University of Munich, Faculty of Physics, will produce a variety of novel two-dimensional materials and test them for their electrical, magnetic, optical and thermal properties...
Document Type: Contract Notice
Reference Number: MQV-EBL
Contract Type: supplies
Estimated Value: 1300000.00 - EUR
Authority Type: pub-undert
Doc Title: Procurement of a dedicated electron beam lithography system
Dispatch Date: 2024-03-21
Publish Date: 2024-03-25
Submission Date: 2024-04-25
Documents
Tender Notice