Prior Information Notice - Maskless Laser Procurement Plan/GPN/PIN - 143095617

Procurement Summary

Country: Germany

Summary: Prior Information Notice - Maskless Laser Lithography System

Deadline: 26 Jul 2026

Posting Date: 11 Jun 2026

Other Information

Notice Type: Procurement Plan/GPN/PIN

TOT Ref.No.: 143095617

Document Ref. No.: 401237-2026

Competition: ICB

Financier: Self Financed

Purchaser Ownership: Public

Tender Value: EUR 510000

CPV Classification

42990000 - Miscellaneous special-purpose machinery

Purchaser's Detail

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Tender Details

Prior Information Notice - Maskless Laser Lithography System The Ferdinand-Braun-Institut (FBH) plans to procure a high-performance maskless laser lithography system within the framework of the EU-funded APECS programme. The system will be used for high-resolution patterning of semiconductor wafers to support the development of advanced heterointegration technologies, including InP- and GaAs-based chiplets. It is intended to enable rapid prototyping as well as efficient processing of wafers with diameters up to 200 mm. The equipment must provide sub-micron precision combined with high throughput and support modern multi-beam laser writing technologies. It will be installed in a cleanroom environment and must comply with ISO class 5 requirements. The procurement procedure is planned for 2026. Doc Title: Prior Information Notice - Maskless Laser Lithography System Contract Type: supplies
Document Type: Prior Information Notice Reference Number: FBH‑05.2 (Maskless Laser Lithography System) Contract Type: supplies Estimated Value: 510000 - EUR Authority Type: la Doc Title: Prior Information Notice – Maskless Laser Lithography System Dispatch Date: 2026-06-10 Publish Date: 2026-06-11 Submission Date: 2026-07-26

Documents

 Tender Notice