Preliminary Information - Procurement Procurement Plan/GPN/PIN - 143095877

Procurement Summary

Country: Germany

Summary: Preliminary Information - Procurement of an Electron Beam Evaporation System for Semiconductor Processes

Deadline: 26 Jul 2026

Posting Date: 11 Jun 2026

Other Information

Notice Type: Procurement Plan/GPN/PIN

TOT Ref.No.: 143095877

Document Ref. No.: 401361-2026

Competition: ICB

Financier: Self Financed

Purchaser Ownership: Public

Tender Value: EUR 1386000

CPV Classification

38000000 - Laboratory, optical and precision equipments (excl. glasses)

Purchaser's Detail

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Tender Details

FBH-03 Electron beam evaporation enabling lift-off processes for 200 mm wafers The client intends to carry out a tender procedure to procure an electron beam evaporation system for semiconductor production. The object is the Delivery of a system for metal deposition on substrates up to 200 mm in diameter as part of micro- and nanoelectronic processes. The procurement serves to expand the process options in the area of ​​semiconductor and photonics technology Framework of the APECS project. Delivery, installation and commissioning of an electron beam evaporation system for metal deposition on semiconductor substrates up to 200 mm. The system is used to produce metallic layers for micro and nanoelectronic applications. Doc Title: Preliminary information - Procurement of an electron beam evaporation system for semiconductor processes Contract Type: supplies
Document Type: Prior Information Notice Reference Number: FBH-03 Deposition module Contract Type: supplies Estimated Value: 1386000 - EUR Authority Type: la Doc Title: Preliminary Information – Procurement of an Electron Beam Evaporation System for Semiconductor processes Dispatch Date: 2026-06-09 Publish Date: 2026-06-11 Submission Date: 2026-07-26

Documents

 Tender Notice