Preliminary Information - Procurement of an Atomic Procurement Plan/GPN/PIN - 143081175

Procurement Summary

Country: Germany

Summary: Preliminary Information - Procurement of an Atomic Layer Etching System

Deadline: 26 Jul 2026

Posting Date: 11 Jun 2026

Other Information

Notice Type: Procurement Plan/GPN/PIN

TOT Ref.No.: 143081175

Document Ref. No.: 399873-2026

Competition: ICB

Financier: Self Financed

Purchaser Ownership: Public

Tender Value: EUR 944000

CPV Classification

38000000 - Laboratory, optical and precision equipments (excl. glasses)

Purchaser's Detail

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Tender Details

Atomic Layer Etching System (ALE) The client intends to carry out a tender procedure to procure an Atomic Layer Etching System (ALE). The subject of the procurement is the delivery, installation and commissioning of a system precise and material-friendly etching of III-V semiconductors (e.g. InP, InGaP, AlGaAs). The aim is to expand and further develop existing process chains in the area of micro- and nanostructuring as part of the APECS project Delivery, installation and commissioning of an Atomic Layer Etching System (ALE) for precise and material-friendly etching of III-V semiconductors. Doc Title: Preliminary Information - Procurement of an Atomic Layer Etching System Contract Type: supplies
Document Type: Prior Information Notice Reference Number: FBH-01.2 Atomic Layer Etcher (ALE) Contract Type: supplies Estimated Value: 944000 - EUR Authority Type: la Doc Title: Vorinformation – Beschaffung eines Atomic Layer Etching Systems Dispatch Date: 2026-06-09 Publish Date: 2026-06-11 Submission Date: 2026-07-26

Documents

 Tender Notice