Plasmasystem (Izm-115.1) - Pr1115793-2590-P Tender - 139442754

The FRAUNHOFER SOCIETY - PURCHASING B12 has issued a Tender notice for the procurement of a Plasmasystem (Izm-115.1) - Pr1115793-2590-P in the Germany. This Tender notice was published on 13 Apr 2026 and is scheduled to close on 11 May 2026, with an estimated Tender value of Refer Document. Interested bidders can access detailed Tender information, eligibility criteria, and complete bidding documents by referencing TOT Ref No. 139442754, while the tender notice number is PR1115793-2590-P and Registering on the platform.

Expired Tender

Procurement Summary

Country: Germany

Summary: Plasmasystem (Izm-115.1) - Pr1115793-2590-P

Deadline: 11 May 2026

Posting Date: 13 Apr 2026

Other Information

Notice Type: Tender

TOT Ref.No.: 139442754

Document Ref. No.: PR1115793-2590-P

Competition: ICB

Financier: Self Financed

Purchaser Ownership: Public

Tender Value: Refer Document

Purchaser's Detail

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Tender Details

1 piece: Plasmasystem (IZM-115.1) The formation of very fine RDLs (redistribution layers) 5 µm on large organic substrates requires the replacement of wet-chemical processes by dry-etching. due to the strongly anistropic character of plasma etching an undercut of the fine cu line can be avoided, opening the way to structures of 2 µm and below. the plasma tool for panel up to 600mm will be a icp system with yery high etch rates for organic materials like photoresists and abf. in contrast to the existing plasma system, optimized for precise metal etching, the new icp tool will allow development and use of very fast etching cycles, compatible with industrial processes. ... additional classification codes quantity

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