Procurement Summary
Country: Germany
Summary: Pecvd System for Processing Semiconductor Structures and Optical Dielectrics
Deadline: 30 Mar 2023
Posting Date: 04 Mar 2023
Other Information
Notice Type: Tender
TOT Ref.No.: 79782870
Document Ref. No.: 133625-2023
Financier: Self Financed
Purchaser Ownership: Public
Tender Value: Refer Document
Purchaser's Detail
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Login to see detailsTender Details
A system for plasma-activated chemical vapor deposition (PECVD) for the processing of semiconductor structures and optical dielectrics is being tendered. The dielectrics to be deposited are used as an insulation layer, passivation layer, hard masks for etching processes, anti-reflective coating, dielectric mirrors and micro-electro-mechanical tunable systems (MEMS).
Doc Title: Laboratory, optical and precision equipments (excl. glasses)
Contract Type: Supplies
Document Type : Contract notice
Reference Number : A 301-23-41
Contract Type : Supplies
38000000 - Laboratory, optical and precision equipments (excl. glasses)
Authority Type : Other
Type of Procedure : Open procedure
Regulation : European Union, with participation by GPA countries
Bid Type : Submission for all lots
Doc Title : Laboratory, optical and precision equipments (excl. glasses)
Dispatch Date : 2023-02-27
Publish Date : 2023-03-03
Submission Date : 2023-03-30
Documents
Tender Notice