Optical Measurement Tool - Pr887737-2380-P Tender, Germany - 117651148

Procurement Summary

Country : Germany

Summary : Optical Measurement Tool - Pr887737-2380-P

Deadline : 13 May 2025

Other Information

Notice Type : Tender

TOT Ref.No.: 117651148

Document Ref. No. : 239211-2025

Financier : Self Financed

Purchaser Ownership : Public

Tender Value : Refer Document

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Tender Details

1 piece Quasi-monolithic integrated (QMI) chiplets combining manifold functions like microprocessors, signal processing high speed interfaces and integrated sensor demand for high quality optical layers. For a quasi-monolithic backend integration of optical chiplets such as photodetectors, lasers, filters, phase shifters or couplers, a large variety of dielectric films (such as SiO2, TiO2, Si3N4 or AlN) is needed to match all requirements of the final system. A precise knowledge of the material parameters like thickness or the complex refractive index over a broad spectral range is essential to tailor the best possible solution for the application. First of all, the measurement of the optical parameters is mandatory to develop the best materials on the new PVD sputtering cluster tool. This is essential to demonstrate the QMI processing line. The measurement of the optical material parameters shall be done by spectroscopic ellipsometry. The covered wavelength range of the system shall be at least 300 nm - 1700 nm with a spectral resolution below 5 nm. The system has to be capable of handling 200 mm wafers in fully automated mode from cassette to cassette. For the data analysis and the material parameter extraction an offline software is mandatory. This software enables advanced material modelling and easy reprocessing of the measured data. This software must be available for a multi-user license. The existing equipment at Fraunhofer IMS cannot cover the needed spectral range a...
Document Type: Contract Notice
Reference Number: PR887737-2380-P
Contract Type: supplies
Authority Type: pub-undert
Doc Title: Optical measurement tool - PR887737-2380-P
Dispatch Date: 2025-04-11
Publish Date: 2025-04-14
Submission Date: 2025-05-13

Documents

 Tender Notice