Laser Lithography Tender in Germany - 144511498

Procurement Summary

Country: Germany

Summary: Laser Lithography

Deadline: 03 Aug 2026

Posting Date: 03 Jul 2026

Other Information

Notice Type: Tender

TOT Ref.No.: 144511498

Document Ref. No.: 458627-2026

Competition: ICB

Financier: Self Financed

Purchaser Ownership: Public

Tender Value: Refer Document

CPV Classification

38000000 - Laboratory, optical and precision equipments (excl. glasses)

Purchaser's Detail

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Tender Details

Laser lithography To equip the clean room for the production of compact quantum systems, devices for a microtechnology process chain are purchased. The result is a complete process technology chain from the wafer substrate to the quantum chip in one clean room provided by the University of Ulm is established. There, the Institute for Quantum Technologies builds, among other things, technologies for compact steam cells and components for quantum memories, based on cold atom technology gases. To equip the clean room, a machine park for the production, processing and integration of cold atomic gases and related quantum technologies is being expanded. As part of this tender, another system for a classic Microstructuring process chain for the clean room was purchased. This is used for direct lithography on the target substrate with high resolution as well as the production of UV lithography masks using laser lithography. The tender only includes: Specified system, the media and peripherals required for this are provided separately by DLR. Further information can be found in the attached service description (contract documents). For equipping the clean room for production compact quantum system, devices for a microtechnology process chain are procured. A complete process technology chain is created from the wafer substrate to the quantum chip, which is carried out in a...
Document Type: Contract Notice Reference Number: ELVIS-ID E67746541 Contract Type: supplies Authority Type: org-sub Doc Title: Laserlithographie Dispatch Date: 2026-07-01 Publish Date: 2026-07-03 Submission Date: 2026-08-03

Documents

 Tender Notice