Inline Afm (Ipms-Cnt10.1; Ipms-Cnt10.3) - Pr908005-2480-P Tender, Germany - 119084717

FRAUNHOFER-GESELLSCHAFT - EINKAUF B12 has floated a tender for Inline Afm (Ipms-Cnt10.1; Ipms-Cnt10.3) - Pr908005-2480-P. The project location is Germany and the tender is closing on 12 Jun 2025. The tender notice number is 309996-2025, while the TOT Ref Number is 119084717. Bidders can have further information about the Tender and can request the complete Tender document by Registering on the site.

Expired Tender

Procurement Summary

Country : Germany

Summary : Inline Afm (Ipms-Cnt10.1; Ipms-Cnt10.3) - Pr908005-2480-P

Deadline : 12 Jun 2025

Other Information

Notice Type : Tender

TOT Ref.No.: 119084717

Document Ref. No. : 309996-2025

Financier : Self Financed

Purchaser Ownership : Public

Tender Value : Refer Document

Purchaser's Detail

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Tender Details

1 piece Inline AFM Complete Atomic Force Microscope system for up to 300 mm wafer metrology, consisting of decoupled xY & Z AFM scanners using flexure guided scan system for all three axes: The tool to be purchased for the 300mm cleanroom should be able to be used within the semiconductor production line for rapid characterization of wafers. The focus here is on the parameters of roughness, structure height, widths (critical dimension) and sidewall angles. It should also be possible to carry out a defect review in order to determine their morphological properties. The system must function fully automatically and also be able to record electrical parameters (e.g. capacities from fF ranges to several hundred pF). The handling system and all parts in contact with the wafer must meet the defined contamination levels in order to be able to process the wafers further. optional service items: 2.2.15Warranty extensionPlease offer an extension of the warranty of further 12 months. During the warranty period all support, repair and parts cost are covered and free of charge.please confirm, yes/no 2.2.29General Equipment RequirementsThe AFM must be able to handle smaller probes manually for measurement (e.g. 200mm wafer, pieces of wafer). There has to be an access to the stage area to place the probe manually. A measurement has to be possible by using tool software. No automated handling needs to be done.please specify - yes/no 2.4.7Cassette and wafer specificationsWafer thickness650 µ...
Document Type: Contract Notice
Reference Number: PR908005-2480-P
Contract Type: supplies
Authority Type: pub-undert
Doc Title: Inline AFM (IPMS-CNT10.1; IPMS-CNT10.3) - PR908005-2480-P
Dispatch Date: 2025-05-12
Publish Date: 2025-05-14
Submission Date: 2025-06-12

Documents

 Tender Notice


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