Inline 300 Mm Full Wafer Xrr (Ipms_Cnt07.1) Tender - 115632963

Procurement Summary

Country: Germany

Summary: Inline 300 Mm Full Wafer Xrr (Ipms_Cnt07.1) - Pr878911-2480-P

Deadline: 01 Apr 2025

Posting Date: 03 Mar 2025

Other Information

Notice Type: Tender

TOT Ref.No.: 115632963

Document Ref. No.: 136560-2025

Competition: ICB

Financier: Self Financed

Purchaser Ownership: Public

Tender Value: Refer Document

CPV Classification

42990000 - Miscellaneous special-purpose machinery

Purchaser's Detail

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Tender Details

1 Inline 300 mm full wafer XRR An X-ray diffractometer suitable for the analysis of 300mm full wafer semiconductor samples in a complete clean room environment. The X-ray diffractometer is intended for clean room operation in the semiconductor area for diffraction measurement (XRD), grazing incidence diffraction measurement (GIXRD), reflectometry measurements (XRR), wide angle XRD (WAXRD) for texture and stress measurements, High-resolution diffraction measurement (HRXRD) and reciprocal space mapping (RSM) on wafers with diameters of 300 mm and 200 mm, with a fully automatic load port and all necessary subsystems (e.g. cooler). Details can be found in the tender documents. optional service items: 21.1LoadportPlease offer a second load port if not already available as a version of the system."Please specify as an option. If a second load port is offered, the full number of points will be awarded, otherwise 0 points will be awarded." 21.2In plane detectorPlease offer an in-plane detector that is compatible with the system required in the specifications."Please specify as an option and whether it can be retrofitted at a later date! If the detector is offered, the full number of points will be awarded, otherwise 0 points will be awarded" 21.31D detectorPlease offer a 1D detector that is compatible with the system required in the specifications."Please specify as an option and whether it can be retrofitted at a later date! If the detector is offered, the full number of points will...
Document Type: Contract Notice

Reference Number: PR878911-2480-P

Contract Type: supplies

Authority Type: pub-undert

Doc Title: Inline 300 mm full wafer XRR (IPMS_CNT07.1) - PR878911-2480-P

Dispatch Date: 2025-02-28

Publish Date: 2025-03-03

Submission Date: 2025-04-01

Documents

 Tender Notice