I-Line-Stepper-Belichtungssystem (Iisb.Wp4.5) Tender - 129585761

Procurement Summary

Country: Germany

Summary: I-Line-Stepper-Belichtungssystem (Iisb.Wp4.5) - Pr840232-2790-P

Deadline: 08 Dec 2025

Posting Date: 06 Nov 2025

Other Information

Notice Type: Tender

TOT Ref.No.: 129585761

Document Ref. No.: 734430-2025

Competition: ICB

Financier: Self Financed

Purchaser Ownership: Public

Tender Value: Refer Document

CPV Classification

37441200 - Stair climbers
42990000 - Miscellaneous special-purpose machinery

Purchaser's Detail

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Tender Details

1 piece i-line stepper exposure system A stand-alone i-line stepper exposure system is sought. This is used for structure transfer by selective exposure of UV light-sensitive photoresist systems through a reducing photomask. The UV radiation is to be generated by a mercury vapor lamp or an LED light source. Options: 2.7 Option of front-to-backside adjustment. Please specify the achievable overlay accuracy between the front and backside plane, as well as information on the substrate conditions that enable or restrict the front-to-backside adjustment (e.g., material, wafer thickness, etc.) 2.9 LED as light source or retrofitting the mercury arc lamp source to an LED light source within 10 years after delivery. 3.3 Processing of 100 mm substrates with substrate characteristics listed in 3.3.1 - 3.3.x. The evaluation of the following points is based on the effort required to convert 150 & 200 mm processing ("standard material") to 100 mm wafer processing. The shorter the conversion times, the better. Please provide information on the average duration and effort for conversion. 3.3.1 Automatic handling (including loading and unloading process), alignment (including "Flat Align": Automatic loading with pre-alignment of the wafers and flat alignment 3σ ≤ 10 µm) and processing (first exposure and exposure with prior alignment) for 100 mm substrates with substrate thicknesses of 200 - 1650 µm (± 25 µm) of transparent, semi-transparent, or opaque materials such as glass, silicon carbid...
Document Type: Contract Notice

Reference Number: PR840232-2790-P

Contract Type: supplies

Authority Type: pub-undert

Doc Title: i-line-Stepper-Belichtungssystem (IISB.WP4.5) - PR840232-2790-P

Dispatch Date: 2025-11-05

Publish Date: 2025-11-06

Submission Date: 2025-12-08

Documents

 Tender Notice