Fbh-02 Prior Information Notice - Wet Chemical Procurement Plan/GPN/PIN - 143084142

Procurement Summary

Country: Germany

Summary: Fbh-02 Prior Information Notice - Wet Chemical Processing Tool (Single Wafer Etching)

Deadline: 26 Jul 2026

Posting Date: 11 Jun 2026

Other Information

Notice Type: Procurement Plan/GPN/PIN

TOT Ref.No.: 143084142

Document Ref. No.: 400550-2026

Competition: ICB

Financier: Self Financed

Purchaser Ownership: Public

Tender Value: EUR 1710000

CPV Classification

42990000 - Miscellaneous special-purpose machinery

Purchaser's Detail

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Tender Details

Prior Information Notice - Wet Chemical Processing Tool (Single Wafer Etching) The Ferdinand-Braun-Institut (FBH) plans to procure a wet chemical processing tool for single wafer etching within the framework of the EU-funded APECS programme. The system is intended for the processing of compound semiconductor materials such as InP, GaAs, AlGaAs, and GaN. The tool will enable highly precise and reproducible etching processes on a per-wafer basis, including endpoint detection functionality. Compared to batch processing, the single wafer approach ensures improved process control and reproducibility, which is essential for low-volume, high-precision semiconductor manufacturing. The equipment will be installed in an existing cleanroom environment and must be compatible with ISO class 5 requirements. The procurement procedure is planned for 2026. The Ferdinand-Braun-Institut (FBH) plans to procure a wet chemical processing tool for single wafer etching within the framework of the EU-funded APECS programme. The system is intended for the processing of compound semiconductor materials such as InP, GaAs, AlGaAs, and GaN. The tool will enable highly precise and reproducible etching processes on a per-wafer basis, including endpoint detection functionality. Compared to batch processing, the single wafer approach ensures improved process control and reproducibility, which is essential for low-volume, high-precision semiconductor manufacturing. The equipment will be installed in an exi...
Document Type: Prior Information Notice Reference Number: FBH-02 Wet Chemical Processing Tool (Single Wafer Etching) Contract Type: supplies Estimated Value: 1710000 - EUR Authority Type: la Doc Title: FBH-02 Prior Information Notice – Wet Chemical Processing Tool (Single Wafer Etching) Dispatch Date: 2026-06-10 Publish Date: 2026-06-11 Submission Date: 2026-07-26

Documents

 Tender Notice