Electron Beam Lithography System Tender in Germany - 65239669

Procurement Summary

Country: Germany

Summary: Electron Beam Lithography System

Deadline: 06 May 2022

Posting Date: 09 Apr 2022

Other Information

Notice Type: Tender

TOT Ref.No.: 65239669

Document Ref. No.: 183577-2022

Competition: ICB

Financier: Self Financed

Purchaser Ownership: Public

Tender Value: Refer Document

CPV Classification

38341100 - Electron-beam recorders

Purchaser's Detail

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Tender Details

Document Type: Contract Notice
Title: Electron beam lithography system
Reference Number: 27-22 LR
Contract Type: Supplies
Description: The University of Duisburg-Essen explored in the center for semiconductor technology and optoelectronics
in Duisburg materials, semiconductor technologies and module integration for applications in the
Maximum frequency electronics and in optoelectronics. In Zho becomes the implementation of the
Research work a consistent process line in a clean room until class 5 (ISO
14644-1) operated.
For the investigation of nanoscale components is a high-resolution
Electron beam lithography system needs. It should be procured a plant that the
The current state of the art in terms of maximum resolution and positioning accuracy
represents. The plant should have a high level of development, e.g. through the use in
Industry and / or research institutes can be assigned. A high Automation is required to effectively enable multi-user operation.
Further information can be found in the assignment documents.
38341100 - Electron-Beam Recorders
Auth ...

Documents

 Tender Notice