The UNIVERSITY DUISBURG-ESSEN has issued a Tender notice for the procurement of a Electron Beam Lithography System in the Germany. This Tender notice was published on 09 Apr 2022 and is scheduled to close on 06 May 2022, with an estimated Tender value of Refer Document. Interested bidders can access detailed Tender information, eligibility criteria, and complete bidding documents by referencing TOT Ref No. 65239669, while the tender notice number is 183577-2022 and Registering on the platform.

Expired Tender

Procurement Summary

Country: Germany

Summary: Electron Beam Lithography System

Deadline: 06 May 2022

Posting Date: 09 Apr 2022

Other Information

Notice Type: Tender

TOT Ref.No.: 65239669

Document Ref. No.: 183577-2022

Financier: Self Financed

Purchaser Ownership: Public

Tender Value: Refer Document

Purchaser's Detail

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Tender Details

Document Type: Contract Notice

Title: Electron beam lithography system

Reference Number: 27-22 LR

Contract Type: Supplies

Description: The University of Duisburg-Essen explored in the center for semiconductor technology and optoelectronics

in Duisburg materials, semiconductor technologies and module integration for applications in the

Maximum frequency electronics and in optoelectronics. In Zho becomes the implementation of the

Research work a consistent process line in a clean room until class 5 (ISO

14644-1) operated.

For the investigation of nanoscale components is a high-resolution

Electron beam lithography system needs. It should be procured a plant that the

The current state of the art in terms of maximum resolution and positioning accuracy

represents. The plant should have a high level of development, e.g. through the use in

Industry and / or research institutes can be assigned. A high Automation is required to effectively enable multi-user operation.

Further information can be found in the assignment documents.



38341100 - Electron-Beam Recorders

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