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FRAUNHOFER-GESELLSCHAFT - EINKAUF B12 has floated a tender for Drie Etch Cluster (Mainframe + 3 Chambers) (Ipms-Mrs07.1; Ipms-Mrs07.2; Ipms-Mrs08.1; Ipms-Mrs08.2) - Pr882587-2480-P. The project location is Germany and the tender is closing on 12 May 2025. The tender notice number is 240460-2025, while the TOT Ref Number is 117666162. Bidders can have further information about the Tender and can request the complete Tender document by Registering on the site.
Procurement Summary
Country : Germany
Summary : Drie Etch Cluster (Mainframe + 3 Chambers) (Ipms-Mrs07.1; Ipms-Mrs07.2; Ipms-Mrs08.1; Ipms-Mrs08.2) - Pr882587-2480-P
Deadline : 12 May 2025
Other Information
Notice Type : Tender
TOT Ref.No.: 117666162
Document Ref. No. : 240460-2025
Financier : Self Financed
Purchaser Ownership : Public
Tender Value : Refer Document
Purchaser's Detail
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Login to see detailsTender Details
1 piece DRIE etch cluster (Mainframe+3 Chambers): MRS07.1: Etching Mainframe MRS07.2: DRIE etching chamber (Chamber1 for deep silicon etching) MRS08.1: Etching module to be integrated into Mainframe MRS07 (chamber 2 for oxide etchuing of thick hardmask MRS08.2: ICP etching module to be integrated into Mainframe MRS07 (chamber 3 for nitride and poly-Si etchung with high selectivity to SiO2) optional service items: 5.7Cassette / Wafer specificationsProcessing of quartz wafer according to above mentioned specsyes/no 7.2Extended WarrantyAn extension of the warranty of further 12 months should be offered. During the warranty period all support, repair and parts cost are free of charge.yes/no 8.7mainframe DRIE-ClusterPreferred lift pin positions (see sheet lift pin positions)"one of the three given configurations yes / no" 12.2Tool AcceptanceThe tool purchase includes a source inspection and process and maintenance training for at least two process engineers and two hardware engineers.yes/no
Doc Title: DRIE etch cluster (Mainframe + 3 Chambers) (IPMS-MRS07.1; IPMS-MRS07.2; IPMS-MRS08.1; IPMS-MRS08.2) - PR882587-2480-P
Contract Type: supplies
Document Type: Contract Notice
Reference Number: PR882587-2480-P
Contract Type: supplies
Authority Type: pub-undert
Doc Title: DRIE etch cluster (Mainframe + 3 Chambers) (IPMS-MRS07.1; IPMS-MRS07.2; IPMS-MRS08.1; IPMS-MRS08.2) - PR882587-2480-P
Dispatch Date: 2025-04-11
Publish Date: 2025-04-14
Submission Date: 2025-05-12
Documents
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