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Delivery of an Electron Beam Lithography System Tender - 141176536

The KURT SCHWABE INSTITUTE FOR MEASUREMENT AND SENSOR TECHNOLOGY MEINSBERG E.V. has issued a Tender notice for the procurement of a Delivery of an Electron Beam Lithography System (E-Beam System) in the Germany. This Tender notice was published on 13 May 2026 and is scheduled to close on 17 Jun 2026, with an estimated Tender value of Refer Document. Interested bidders can access detailed Tender information, eligibility criteria, and complete bidding documents by referencing TOT Ref No. 141176536, while the tender notice number is 328405-2026 and Registering on the platform.

Expired Tender

Procurement Summary

Country: Germany

Summary: Delivery of an Electron Beam Lithography System (E-Beam System)

Deadline: 17 Jun 2026

Posting Date: 13 May 2026

Other Information

Notice Type: Tender

TOT Ref.No.: 141176536

Document Ref. No.: 328405-2026

Competition: ICB

Financier: Self Financed

Purchaser Ownership: Public

Tender Value: Refer Document

CPV Classification

31712100 - Microelectronic machinery and apparatus

Purchaser's Detail

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Tender Details

Delivery, installation and commissioning of an electron beam lithography system (E-beam system). Delivery of an electron beam lithography system (e-beam system) The contractor delivers, installs and hands over a defined one to the client Electron beam lithography system for high-resolution structuring of micro- and nanostructures. A detailed description can be found in the list of services. Doc Title: Delivery of an electron beam lithography system (e-beam system) Contract Type: supplies
Document Type: Contract Notice Reference Number: 2026-1 Contract Type: supplies Authority Type: body-pl-ra Doc Title: Lieferung einer Elektronenstrahl-Lithografieanlage (E-Beam-System) Dispatch Date: 2026-05-12 Publish Date: 2026-05-13 Submission Date: 2026-06-17

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