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ENERGY, DEPARTMENT OF has floated a tender for Wafer Spinner - SEE DESCRIPTION (G5-213047.1). The project location is USA and the tender is closing on 13 Aug 2025. The tender notice number is 5-B193-Q-00686-00, while the TOT Ref Number is 124211952. Bidders can have further information about the Tender and can request the complete Tender document by Registering on the site.
Procurement Summary
Country: USA
Summary: Wafer Spinner - SEE DESCRIPTION (G5-213047.1)
Deadline: 13 Aug 2025
Other Information
Notice Type: Tender
TOT Ref.No.: 124211952
Document Ref. No.: 5-B193-Q-00686-00
Financier: Self Financed
Purchaser Ownership: Public
Tender Value: Refer Document
Purchaser's Detail
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Login to see detailsTender Details
Description
Argonne National Laboratory is seeking to source:1qty Wafer spinner that can spin photoresist and other polymers
- splash ring
- speed 50-99rpm, 100-8000rom (+/- 1 rpm) with 150mm round
- Bowl Cover made of safety glass
- Process bowl of polypropylene (removable)
- d- igital vacuum gauge
- vacuum monitoring
- cover open interlock
- 115VAC 60/50hz 5/3 single phase
- Acceleration 4000 rpm/sec
- spinning time 1s-999s
- 200 recipes with 40 steps each
- waste bottle (0.5l in front of spinner)
- Exhaust connection PG11 tube
- Dimension: (wxdxh) cannot exceed (350x446x430mm)
- directly-coupled hollow shaft motor with a transparent liquid separator on the vacuum line
- spin chucks for : 150mm, 100mm, 3", 2" - with centering rings
- piece chuck with 3mm diameter vacuum area
- spare bowl
- spare waste bottle
- options for future dispense and edge bead upgrades
Please see attached solicitation package - on the ANL-70 form: Please remember to complete points A-F on page 3.
NO SOLICITATION WILL BE CONSIDERED WITHOUT ALL THESE COMPLETED. If any components are missing, your solicitation will be discarded.
All forms and signed solicitation have a requested completion date of 8/13/25 at 12PM CST. If there are any questions please feel free to reach out to awegrzyn@anl.gov.
Active Contract Opportunity
Notice ID : 5-B193-Q-00686-00
Related Notice
Department/Ind. Agency : ENERGY, DEPARTMENT OF
Sub-tier : ENERGY, DEPARTMENT OF
Office: ARGONNE NATL LAB - DOE CONTRACTOR
General Information
Contract Opportunity Type: Solicitation (Original)
Original Published Date: Aug 08, 2025 12:29 pm CDT
Original Date Offers Due: Aug 13, 2025 12:00 pm CDT
Inactive Policy: Manual
Original Inactive Date: Aug 14, 2025
Initiative: None
Classification
Original Set Aside:
Product Service Code: 6640 - LABORATORY EQUIPMENT AND SUPPLIES
NAICS Code: 333242 - Semiconductor Machinery Manufacturing
Place of Performance: Lemont, IL 60439 USA
Documents
ANL-70A-Reps-and-Certs-Short-26-MAR-2025.PDF
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