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The ENERGY, DEPARTMENT OF has issued a Tender notice for the procurement of a Tabletop Maskless Aligner System in the USA. This Tender notice was published on 03 Sep 2026 and is scheduled to close on 16 Sep 2026, with an estimated Tender value of Refer Document. Interested bidders can access detailed Tender information, eligibility criteria, and complete bidding documents by referencing TOT Ref No. 148431556, while the tender notice number is and Registering on the platform.
Procurement Summary
Country: USA
Summary: Tabletop Maskless Aligner System
Deadline: 16 Sep 2026
Posting Date: 03 Sep 2026
Other Information
Notice Type: Tender
TOT Ref.No.: 148431556
Document Ref. No.:
Competition: ICB
Financier: Self Financed
Purchaser Ownership: Public
Tender Value: Refer Document
Purchaser's Detail
Name: Login to see tender_details
Address: Login to see tender_details
Email: Login to see tender_detailsLogin to see details Tender Details SLAC National Accelerator Laboratory is operated by Stanford University for the Department of Energy. As a management and operating contractor, subcontracts awarded by the Laboratory are not Federal procurements, and are not directly subject to the Federal Acquisition Regulations in 48 CFR. Nonetheless, certain Federal laws, Executive Orders, and regulations may affect our DOE approved purchasing system, as required by statute, regulation, or contract terms and conditions. Documents
Please review the listed requirements and provide your best and final offer for both price and lead-time.
The follow has been attached for you to complete and review:
(BAA) Buy American Act Certification
Representations & Certifications Rider
SubcontractorFormIIPP (onsite)
Certificate of Insurance (onsite)
Confirm Attached SLAC terms are accepted: FP Commercial Supplies-Services T&Cs (August 2023)
Confirm Attached SLAC terms are accepted: SLAC General Terms and Conditions Supplemental Rider (Rev. August 2026)
Confirm Attached SLAC terms are accepted: Green On Site Services Rider(January 2025)/Non-Green On Site Services Rider(January 2025)
Request for Quote:
Required item(s) listed below:
Tabletop maskless aligner system - QTY:1
Source selection will be based on Lowest Price and Technically Acceptable Method (LPTA).
Technical evaluation criteria are as follows:
System Form Factor and Vibration Isolation: Tabletop maskless lithography system mounted on an anti-vibration table suitable for cleanroom installation.
Exposure Strategy and Modes: Dual exposure capability including raster mode and stitching-free mode. Light source: for exposure of broadband and special i-line photoresists
Resolution and Patterning Performance: Minimum feature size ≤ 0.6 µm Minimum lines and spaces ≤ 0.8 µm CD uniformity ≤ 0.2 µm (3σ) 256-level grayscale mode
Alignment System: Overlay / 2nd-layer alignment accuracy ≤ 1 µm over 50 × 50 mm² Dr...
Notice ID: slac_368016_tabletopmasklessalignersystem
Department/Ind. Agency: energy, department of
Sub-tier: energy, department of
Office: slac natl accel lab -doe contractor
Product Service Code: aj12 - general science and technology r&d services; general science and technology; applied research
NAICS Code: 3333 - Commercial and Service Industry Machinery Manufacturing
Inactive Dates: oct 01, 2026
Inactive Policy: 15 days after date offers due
Procurement Documents for USA
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