Suss Acs200 Control System Upgrade Tender in USA - 140662079

Procurement Summary

Country: USA

Summary: Suss Acs200 Control System Upgrade

Deadline: 18 May 2026

Posting Date: 05 May 2026

Other Information

Notice Type: Tender

TOT Ref.No.: 140662079

Document Ref. No.: NIST-SS26-116

Competition: ICB

Financier: Self Financed

Purchaser Ownership: Public

Tender Value: Refer Document

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Tender Details

Title: SUSS ACS200 Control System Upgrade Combined Sources Sought/ Notice of Intent to Sole Source
*****THIS IS A COMBINED SOURCES SOUGHT NOTICE AND NOTICE OF INTENT TO SOLE SOURCE***.
BACKGROUND
The National Institute of Standards and Technology (NIST) Center for Nanoscale Science and Technology (CNST) enables science and industry by providing essential measurement methods, instrumentation, and standards to support all phases of nanotechnology development, from discovery to small production at the Gaithersburg, MD campus. The CNST cleanroom supports numerous NIST and external projects, including the NIST‑on‑a‑chip nanophotonic efforts, that utilize complex processing involving aggressively scaled patterning, etching and deposition and numerous CHIP funded research projects. A high-quality pattern developing and resist coating are essential prerequisites for the precision nanoscale lithography required for micro/nano fabrication.
Precision nanoscale lithographic imaging is a critical part of the CNST NanoFab mission. The NanoFab has a need to apply these highly controlled processes repeatedly to every target substrate throughout the entire period of projects and independent from the influence of operators. CNST has a tool which can satisfy all these requirements, and it is the ACS200 Microlithography Cluster. Currently this tool is not operational due to the broken control computer. The existing computer is also too old and Suss no longer offers the same replacement. To work with the newer computer, electronic controller also needs to be upgraded and re-configurated. CNST has a strong need to repair/upgrade this micro-lithography cluster system, an automated (“cassette-to-cassette”) cluster system that has the capability to provide a highly controllable, repeatable, and automated process for spin coating, spray coating, developing and hot plate curing of organic or dielectric films. The reviving of this system is highly demanded by broad user groups.br...
Notice ID: nist-ss26-116

Department/Ind. Agency: commerce, department of

Sub-tier: national institute of standards and technology

Office: dept of commerce nist

Product Service Code: 6640 - laboratory equipment and supplies

NAICS Code: 334516 - Analytical Laboratory Instrument Manufacturing

Inactive Dates: jun 02, 2026

Inactive Policy: 15 days after response date

Documents

 Tender Notice