Procurement Summary
Country: France
Summary: Supply of Saxs, Gisaxs and Waxs Analysis Equipment
Deadline: 01 Mar 2021
Posting Date: 02 Feb 2021
Other Information
Notice Type: Tender
TOT Ref.No.: 49792908
Document Ref. No.: 051882-2021
Competition: ICB
Financier: Self Financed
Purchaser Ownership: -
Tender Value: Refer Document
CPV Classification
31712000 - Microelectronic machinery and apparatus and microsystems
Purchaser's Detail
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Login to see detailsTender Details
Document Type: Contract notice
Title: Supply of SAXS, GISAXS and WAXS analysis equipment
Reference Number: AOO-B20-06237-EB
Contract Type: Supplies
Description: CEA / LETI wishes to purchase equipment that performs SAXS (Small Angle X-Ray Scattering), GISAXS (Grazing Incidence-SAXS) and WAXS (Wide Angle X-Ray Scattering) analyzes.
This tool is mainly dedicated to the analysis of nanoelectronic structures such as line arrays for lithographic applications, thin films of DSA / block copolymers, and thin metallic, dielectric, oxide films etc.
The equipment offers as a mandatory option: the installation of a 3rd Xray source.
31712000 - Microelectronic machinery and apparatus and microsystems
Authority Type: Body governed by public law
Type of Procedure: Open procedure
Regulation: European Union, with participation by GPA countries
Bid Type: Submission for all lots
Doc Title: Microelectronic machinery and apparatus and microsystems
Dispatch Date: 2021-01-28
Publish Date: 2021-02-02
Submission Date: 2021-03-01
Documents
Tender Notice