Supply of a Multi Purpose Cmp in Integrated Cmp Metrology Module Tender, France - 119364098

Procurement Summary

Country : France

Summary : Supply of a Multi Purpose Cmp in Integrated Cmp Metrology Module

Deadline : 18 Jun 2025

Other Information

Notice Type : Tender

TOT Ref.No.: 119364098

Document Ref. No. : 320808-2025

Financier : Self Financed

Purchaser Ownership : Public

Tender Value : Refer Document

Purchaser's Detail

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Tender Details

For its research activities, CEA-LETI wishes to acquire an integrated measurement system for its EBARA FREx200M2 chemical mechanical polishing tool, a chemo-mechanical polishing tool. This equipment must treat 200 mm platelets and must be fully integrated and connected toThe CMP tool.

This equipment will be used as a measurement system to control the CPM process. It must be integrated and connected to the new 200 mm CEA-Leti tool. The metrology tool must be able to perform automatic measurements on silicon or glass substrates.

He must manipulateAnd measure silicon plates of 200 mm, with different materials deposited, such as silicon oxide, silicon nitride, poly-silicon on silicon oxide, and measure plates with or without patterns, platelets with or without patterns.

This market has:

equipment of equipmentBase

An option with compulsory costing relating to the extension of warranty for an additional year beyond the legal warranty of one year.

One (s) optional option (s):

Option 1: Maintenance training Level 1

Option 2: Advanced maintenance training

Supply of a metrology moduleIntegrated CMP 200mm Multi purposes

This market includes:

This market also includes the following compulsory option:

Supply of an additional warranty extension beyond the legal guarantee of one year

This market includes the following optional options:

Op...
Document Type: Contract Notice

Reference Number: PN-B25-01923-NJ

Contract Type: supplies

Authority Type: body-pl

Doc Title: Fourniture d'un module de metrologie integree CMP 200 mm multi purpose

Dispatch Date: 2025-05-15

Publish Date: 2025-05-19

Submission Date: 2025-06-18

Documents

 Tender Notice