Suite of Smaract Nanopositioners Tender in USA - 141643000

Procurement Summary

Country: USA

Summary: Suite of Smaract Nanopositioners

Deadline: 02 Jun 2026

Posting Date: 20 May 2026

Other Information

Notice Type: Tender

TOT Ref.No.: 141643000

Document Ref. No.: NIST-SS26-CHIPS-128

Competition: ICB

Financier: Self Financed

Purchaser Ownership: Public

Tender Value: Refer Document

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Tender Details

*****THIS IS A COMBINED SOURCES SOUGHT NOTICE AND NOTICE OF INTENT TO SOLE SOURCE***.
BACKGROUND
The National Institute of Standards and Technology (NIST), Applied Physics Division, Spin Electronics group require a suite of a high-specification nanopositioners and hexapods.
The semiconductor supply chain is global, specialized, and interconnected. Chipmakers do business with thousands of individual suppliers that provide the highly complex materials and tools used to produce semiconductors. To address the lack of full visibility into the semiconductors markets supply chain and R&D ecosystem gaps NIST will conduct the measurement science, or metrology, critical to the development of new materials, packaging, and production methods in chip manufacturing. As part of this effort, NIST has a program to develop new methods to non-destructively measure and characterize the structure of complex nanoscopic devices. This approach is based on applying an extreme ultraviolet (EUV) high-harmonic generation (HHG) light source to combine reflectometry with spatial imaging and atomic core level spectroscopy. This effort requires precise nanoscopic positioning of both the EUV optics and the sample position and orientation with strict operation under high vacuum conditions. This can only be accomplished with piezo-nanopositioners specifically designed for operation in high-vacuum conditions. Furthermore, due to the presence of magnetic fields in a section of the system, one hexapod-like system and one 4 axis assembly must be comprised of non-magnetic materials and whose performance cannot be compromised when operated in magnetic fields as high as 1 Tesla. Furthermore, we must maintain compatibility (software and hardware) and seamless interchangeability with existing SmarAct nanopositioners already in use in the beamline at NIST.
The goal of this contract is to supply multiple high-vacuum compatible piezo controlled nanopositioning stages along with all necessary control...
Notice ID: nist-ss26-chips-128

Department/Ind. Agency: commerce, department of

Sub-tier: national institute of standards and technology

Office: dept of commerce nist

Product Service Code: 6640 - laboratory equipment and supplies

NAICS Code: 334516 - Analytical Laboratory Instrument Manufacturing

Inactive Dates: jun 17, 2026

Inactive Policy: 15 days after response date

Documents

 Tender Notice