Sources Sought Notice for EUV Reflectometer for SURF III Tender, USA - 115576230

Procurement Summary

Country : USA

Summary : Sources Sought Notice for EUV Reflectometer for SURF III

Deadline : 14 Mar 2025

Other Information

Notice Type : Tender

TOT Ref.No.: 115576230

Document Ref. No. : NIST-FY25-CHIPS-0070

Financier : Self Financed

Purchaser Ownership : Public

Tender Value : Refer Document

Purchaser's Detail

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Tender Details

Description

The National Institute of Standards and Technology (NIST) has been conducting Extreme Ultraviolet (EUV) metrology for over fifty years. The metrology services are provided for Industry, academia and Government customers for a wide variety of applications. NIST-s EUV metrology effort relies on the Synchrotron Ultraviolet Radiation Facility (SURF III) as its primary EUV light source for both source-based and detector-based radiometric measurements. One of the beamlines (beamline 7) located on SURF III includes a grazing incidence monochromator and reflectometer facility for reflectance measurements in the EUV region. This sources sought is for a replacement reflectometer vacuum chamber and goniometer for beamline 7 to provide improved performance, reliability and efficiency. The beamline 7 monochromator is also to be replaced which is a subject of an additional sources sought request. (Notice ID:

NIST-FY25-CHIPS-0067 on SAM.gov)



NIST is seeking information from sources that may be capable of providing a solution that will achieve the objectives described above, in addition to the following essential requirements:



Location: The Reflectometer shall be installed at the SURF III facility at NIST-s Gaithersburg campus. SURF III operates with the following conditions:

Electron Energy: 380 MeV

Electron beam Radius of Curvature: 0.83 m

Frequency: 114 MHz (2 bunches @ 57 MHz)

Beam current: 300 mA to 100 mA

Beam size (H x W, FWHM): 2 mm x 3.56 mm - 3.2 mm, (depending on beam current)

Beam height: 157.5 cm above floor

The reflectometer must occupy available space:

Reflectometer shall be located in the existing laboratory space with the goniometer-s motions centered at the beamline 7 monochromator-s output approximately 402 cm (TBD, based on monochromator-s design) along line of sight from the radiation wall.

Height of exit slit: 114 cm from laboratory floor. (estimated, TBD based on monochromator-s design...
Active Contract Opportunity
Notice ID : NIST-FY25-CHIPS-0070
Related Notice
Department/Ind. Agency : COMMERCE, DEPARTMENT OF
Sub-tier : NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY
Office: DEPT OF COMMERCE NIST
General Information
Contract Opportunity Type: Sources Sought (Original)
Original Published Date: Feb 28, 2025 12:07 pm EST
Original Response Date: Mar 14, 2025 11:00 am EDT
Inactive Policy: 15 days after response date
Original Inactive Date: Mar 29, 2025
Initiative: None

Classification
Original Set Aside:
Product Service Code: 6640 - LABORATORY EQUIPMENT AND SUPPLIES
NAICS Code: 334515 - Instrument Manufacturing for Measuring and Testing Electricity and Electrical Signals

Place of Performance: Gaithersburg, MD 20899 USA

Documents

 Tender Notice