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The COMMERCE, DEPARTMENT OF | NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY has issued a Tender notice for the procurement of a Semiconductor Process Residual Gas Analyzer in the USA. This Tender notice was published on 01 Sep 2026 and is scheduled to close on 14 Sep 2026, with an estimated Tender value of Refer Document. Interested bidders can access detailed Tender information, eligibility criteria, and complete bidding documents by referencing TOT Ref No. 148276909, while the tender notice number is 1333ND26QNB640573 and Registering on the platform.
Procurement Summary
Country: USA
Summary: Semiconductor Process Residual Gas Analyzer
Deadline: 14 Sep 2026
Posting Date: 01 Sep 2026
Other Information
Notice Type: Tender
TOT Ref.No.: 148276909
Document Ref. No.: 1333ND26QNB640573
Competition: ICB
Financier: Self Financed
Purchaser Ownership: Public
Tender Value: Refer Document
Purchaser's Detail
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Email: Login to see tender_detailsLogin to see details Tender Details SOLICITATION 1333ND26QNB640573 Documents
Semiconductor Process Residual Gas Analyzer
This is a solicitation for commercial items prepared in accordance with the format in RFO Subpart 12.2, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; quotations are being requested, and a separate written document will not be issued.
This solicitation is a Request for Quotation (RFQ).
The associated North American Industrial Classification System (NAICS) code for this procurement is 334516 - Analytical Laboratory Instrument Manufacturing with a Small Business size standard of 1, 000 Employees. This requirement will be a Full and Open Competition.
The Chemical Process and Nuclear Measurements Group is seeking a semiconductor-grade Process Residual Gas Analyzer (RGA) for use on flow systems, including an ALD reactor, as part of a CHIPS R&D Metrology program. This program focuses on developing digital twin technology for semiconductor manufacturing equipment. The flow systems, equipped with in situ and inline sensors, are used to acquire process data on thin film growth characterization. The RGA will serve as an online process diagnostic. The RGA must be compatible with low-volatility organometallic and metal halide precursors and process gases. The data and models generated by this project will lead to improvements in process optimization and control, ultimately resulting in cost savings for the US semiconductor industry.
Notice ID: 1333nd26qnb640573
Department/Ind. Agency: commerce, department of
Sub-tier: national institute of standards and technology
Office: dept of commerce nist
Product Service Code: 6640 - laboratory equipment and supplies
NAICS Code: 334516 - Analytical Laboratory Instrument Manufacturing
Inactive Dates: sep 29, 2026
Inactive Policy: 15 days after date offers due
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