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Optical Film Stress Measurement Tool Tender in Finland - 141513801

The TECHNOLOGY RESEARCH CENTER VTT OY has issued a Tender notice for the procurement of a Optical Film Stress Measurement Tool in the Finland. This Tender notice was published on 18 May 2026 and is scheduled to close on 15 Jun 2026, with an estimated Tender value of Refer Document. Interested bidders can access detailed Tender information, eligibility criteria, and complete bidding documents by referencing TOT Ref No. 141513801, while the tender notice number is 613756 and Registering on the platform.

Procurement Summary

Country: Finland

Summary: Optical Film Stress Measurement Tool

Deadline: 15 Jun 2026

Posting Date: 18 May 2026

Other Information

Notice Type: Tender

TOT Ref.No.: 141513801

Document Ref. No.: 613756

Competition: ICB

Financier: Self Financed

Purchaser Ownership: Public

Tender Value: Refer Document

Purchaser's Detail

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Tender Details

THE OBJECT OF THE TENDER PROCESSThe object of the procurement is a 200 mm automated film stress and wafer bow analysis system using a non-contact laser scanning technique for the VTT Micronova cleanroom. The procurement includes a room temperature automated thin-film stress measurement system, cassette load lock, robot to handle the wafers, programmable automatic wafer scanning system, and analysis software. The tool should be designed to be used inside the clean room. The supplier will take to consideration the environmental conditions of the tool installation location and will work together with VTT to reduce the external impact on facility. The automated thin-film stress analysis system is for non-patterned, non-texture 200 mm wafer stress measurement. The technical specification of the object of the tender and its minimum requirements is described in more detail in this Annex 1 of the invitation to tender. The tendered Tool must comply with all technical properties and functionalities, performance specifications and acceptance criteria as set out in Annex 1 and Annex 2 (“Facilities, materials and connector types”). A tender which does not meet one or more of the requirements specified in the Annex 1 and Annex 2, may be rejected for failing to comply with the call for tenders.The comparison criterion for the tenders is economic advantageous (see section "Grounds for decision") with 80 % price weighting and 20 % quality weighting. A reference price has to be given for th...
Published: 17/05/2026 Deadline for submitting questions: 28/05/2026 Deadline for tenders: 15/06/2026

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