Notice of Intentbmf Hf Vapor Etcher Tender in USA - 140962586

Procurement Summary

Country: USA

Summary: Notice of Intentbmf Hf Vapor Etcher

Deadline: 18 May 2026

Posting Date: 09 May 2026

Other Information

Notice Type: Tender

TOT Ref.No.: 140962586

Document Ref. No.: NB680000-26-01364

Competition: ICB

Financier: Self Financed

Purchaser Ownership: Public

Tender Value: Refer Document

Purchaser's Detail

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Tender Details

The National Institute of Standards and Technology (NIST) Acquisition Management Division intends to negotiate with Idonus Sarl (Cage: SCH63), located in Switzerland on a sole source basis under the authority of FAR Subpart FAR RFO 12.102(a) for a BMF HF Vapor Etcher, Statutory authority for sole source is 41 U.S.C. 3304(a)(1), Only one responsible source. The statute is being implemented using simplified acquisition procedures under the authority of 41 U.S.C. 1901.
The sole source determination is based on the Government-s need by the Boulder Microfabrication Facility (BMF) for performing various etching processes in the Precision Measurement Laboratory located at National Institute of Standards and Technology-s (NIST) Boulder campus. The BMF currently has a vapor etching system that is used to remove silicon dioxide films from substrates. The current system can only accept substrates with a maximum size of wafers with a lateral dimension of SEMI spec 100 mm wafers. The BMF also processes wafers with a lateral dimension of SEMI spec 150 mm wafers, and some of the new fabrication processes require HF vapor etching. Therefore, the BMF requires a new HF vapor etcher with all of the existing capabilities as the existing vapor etcher, but with the ability to accept substrates up to wafers with a lateral dimension of SEMI spec 150 mm wafers.
The NAICS Code is 334516 - Analytical Laboratory Manufacturing, with a Size Standard of 1, 000 employees. NIST anticipates negotiating and awarding a firm-fixed-price purchase order to Idonus Sarl for this requirement.
Interested parties that can demonstrate they could satisfy the requirements listed above for NIST must clearly and unambiguously identify their capability to do so in writing on or before the response date for this notice. This notice of intent is not a solicitation. Information submitted in response to this notice will be used solely to determine whether competitive procedures could be used for this acquisitio...
Notice ID: nb680000-26-01364

Department/Ind. Agency: commerce, department of

Sub-tier: national institute of standards and technology

Office: dept of commerce nist

Product Service Code: 6640 - laboratory equipment and supplies

NAICS Code: 334516 - Analytical Laboratory Instrument Manufacturing

Inactive Dates: jun 02, 2026

Inactive Policy: 15 days after response date

Documents

 Tender Notice