Notice of Intent to Noncompetitively Acquire Rapid Tender - 140966335

Procurement Summary

Country: USA

Summary: Notice of Intent to Noncompetitively Acquire Rapid Thermal Annealing Rta System

Deadline: 22 May 2026

Posting Date: 09 May 2026

Other Information

Notice Type: Tender

TOT Ref.No.: 140966335

Document Ref. No.: NIST-SS26-118

Competition: ICB

Financier: Self Financed

Purchaser Ownership: Public

Tender Value: Refer Document

Purchaser's Detail

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Tender Details

Announcement Type: Special Notice
Classification Code: 6695
Announcement Number: NIST-SS26-118
Subject: Notice of Intent to Noncompetitively Acquire Rapid Thermal Annealing (RTA) system - Annealsys
The National Institute of Standards and Technology located in Boulder, Colorado has a state-of-the-art research laboratory (the Katharine Blodgett Gebbie Building) to support the most sensitive research done at NIST. Included in this building is a Class 100 microelectronics fabrication facility, called the Boulder Micro-Fabrication Facility (BMF). One of the tools in the BMF is a Rapid Thermal Annealing (RTA) system that is used to anneal films from substrates. The BMF currently has a system that can anneal substrates with a size of up to 100 mm, but the BMF currently requires a system that can anneal substrates with a size of up to 150 mm. The BMF requires a similar system to the existing system with some added features such as a vacuum chamber.
NIST intends to award a non-competitive contract to Annealsys for an RTA system to be used at the BMF.
This notice is not a request for a quotation. A solicitation document will not be issued, and quotations will not be requested.
This acquisition is being conducted under the authority of RFO 12.102(a). The North American Industry Classification System (NAICS) code for this acquisition is 334516, Analytical Laboratory Instrument Manufacturing.
NIST requires a solution that meets the following minimum requirements:
1. The BMF currently has a system that can anneal substrates with a size of up to 100 mm, but the BMF currently requires a system that can anneal substrates with a size of up to 150 mm.
2. The BMF requires a similar system to the existing system with some added features such as a vacuum chamber.
3. The BMF requires that this system fit in a space of 1 m x 1 m x 2 m, which is the space allocated to the current system and requires a measure to directly measure the substrate in-situ using ...
Notice ID: nist-ss26-118

Department/Ind. Agency: commerce, department of

Sub-tier: national institute of standards and technology

Product Service Code: 6695 - combination and miscellaneous instruments

NAICS Code: 334516 - Analytical Laboratory Instrument Manufacturing

Inactive Dates: jun 06, 2026

Inactive Policy: 15 days after response date

Documents

 Tender Notice