Procurement Summary
Country: Switzerland
Summary: Multitube Thermal Processing Furnace (Mtpf) for Oxidation and Lpcvd at the Psi Pico Cleanroom
Deadline: 20 Jul 2026
Posting Date: 25 Apr 2026
Other Information
Notice Type: Tender
TOT Ref.No.: 140118841
Document Ref. No.: 35864-01
Competition: ICB
Financier: Self Financed
Purchaser Ownership: Public
Tender Value: Refer Document
CPV Classification
38000000 - Laboratory, optical and precision equipments (excl. glasses)
Purchaser's Detail
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Tender Details
The equipment to be procured is a multitube thermal processing furnace (MTPF) essential for the deposition of materials for quantum, photonic and x-ray applications of the groups at the LNQ and LXN laboratories and for all PSI cleanroom users. The MTPF should have a horizontal arrangement of the tubes and should be capable to process in one load up to 50 wafers of 200 mm diameter with good within-wafer, wafer-to-wafer and batch-to-batch uniformity. The MTPF should have an automation option allowing to process, at least, 4 wafer batches of 50 wafers in the same or different tubes one after the other without the presence of operator. Main CPV: 38000000 Laboratory, optical and precision equipments (excl. glasses)
Date of execution: 01.09.2026 – 01.12.2027 Contract duration: Not specified Round of questions 1, Submit by: 15.07.2026 Submission of tender: 20.07.2026, 14:00 Tender valid until: 120 Days after submission deadline Opening of tenders: 21.07.2026
Documents
Tender Notice