Multitube Thermal Processing Furnace (Mtpf) Tender - 140118841

The PAUL SCHERRER INSTITUTE (PSI) has issued a Tender notice for the procurement of a Multitube Thermal Processing Furnace (Mtpf) for Oxidation and Lpcvd at the Psi Pico Cleanroom in the Switzerland. This Tender notice was published on 25 Apr 2026 and is scheduled to close on 20 Jul 2026, with an estimated Tender value of Refer Document. Interested bidders can access detailed Tender information, eligibility criteria, and complete bidding documents by referencing TOT Ref No. 140118841, while the tender notice number is 35864-01 and Registering on the platform.

Expired Tender

Procurement Summary

Country: Switzerland

Summary: Multitube Thermal Processing Furnace (Mtpf) for Oxidation and Lpcvd at the Psi Pico Cleanroom

Deadline: 20 Jul 2026

Posting Date: 25 Apr 2026

Other Information

Notice Type: Tender

TOT Ref.No.: 140118841

Document Ref. No.: 35864-01

Competition: ICB

Financier: Self Financed

Purchaser Ownership: Public

Tender Value: Refer Document

CPV Classification

38000000 - Laboratory, optical and precision equipments (excl. glasses)

Purchaser's Detail

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Tender Details

The equipment to be procured is a multitube thermal processing furnace (MTPF) essential for the deposition of materials for quantum, photonic and x-ray applications of the groups at the LNQ and LXN laboratories and for all PSI cleanroom users. The MTPF should have a horizontal arrangement of the tubes and should be capable to process in one load up to 50 wafers of 200 mm diameter with good within-wafer, wafer-to-wafer and batch-to-batch uniformity. The MTPF should have an automation option allowing to process, at least, 4 wafer batches of 50 wafers in the same or different tubes one after the other without the presence of operator. Main CPV: 38000000 Laboratory, optical and precision equipments (excl. glasses)
Date of execution: 01.09.2026 – 01.12.2027 Contract duration: Not specified Round of questions 1, Submit by: 15.07.2026 Submission of tender: 20.07.2026, 14:00 Tender valid until: 120 Days after submission deadline Opening of tenders: 21.07.2026

Documents

 Tender Notice


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