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UNIVERSITY OF JYVÄSKYLÄ has floated a tender for Lbl System. The project location is Finland and the tender is closing on 12 May 2025. The tender notice number is 230844-2025, while the TOT Ref Number is 117436139. Bidders can have further information about the Tender and can request the complete Tender document by Registering on the site.
Procurement Summary
Country : Finland
Summary : Lbl System
Deadline : 12 May 2025
Other Information
Notice Type : Tender
TOT Ref.No.: 117436139
Document Ref. No. : 230844-2025
Financier : Self Financed
Purchaser Ownership : Public
Tender Value : Refer Document
Purchaser's Detail
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Login to see detailsTender Details
A laser beam lithography system (LBL) for advanced microfabrication of semiconductor and biomedical devices. The system will be installed in a clean-room facility of class iso 5, forming part of a larger lithography research line. The system must meet high performance specifications for resolution. The system is intended for exposure of photoresists where suitable exposure wavelength is 375 nm. The majority of processing will occur on chips sized from 5 mm by 5 mm up to standard 4 inch diameter wafers, however we require that up to 5 x 5 inch substrates can fit into the system. The LBL system should have good support for mix-and-match lithography, i.e. well documented procedures for sharing CAD pattern libraries for straightforward implementation in mix-and-match exposures with the EBL system in lot 1. The system needs to be installed by the supplier. Prior references of supplying comparable systems are required.
Doc Title: LBL system
Contract Type: supplies
Document Type: Contract Notice
Reference Number: 49/02.03.00.00/2025
Contract Type: supplies
Authority Type: body-pl
Doc Title: LBL system
Dispatch Date: 2025-04-08
Publish Date: 2025-04-09
Submission Date: 2025-05-12
Documents
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