The UNIVERSITY OF JYVÄSKYLÄ has issued a Tender notice for the procurement of a Lbl System in the Finland. This Tender notice was published on 09 Apr 2025 and is scheduled to close on 12 May 2025, with an estimated Tender value of Refer Document. Interested bidders can access detailed Tender information, eligibility criteria, and complete bidding documents by referencing TOT Ref No. 117436139, while the tender notice number is 230844-2025 and Registering on the platform.

Expired Tender

Procurement Summary

Country: Finland

Summary: Lbl System

Deadline: 12 May 2025

Posting Date: 09 Apr 2025

Other Information

Notice Type: Tender

TOT Ref.No.: 117436139

Document Ref. No.: 230844-2025

Financier: Self Financed

Purchaser Ownership: Public

Tender Value: Refer Document

Purchaser's Detail

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Tender Details

A laser beam lithography system (LBL) for advanced microfabrication of semiconductor and biomedical devices. The system will be installed in a clean-room facility of class iso 5, forming part of a larger lithography research line. The system must meet high performance specifications for resolution. The system is intended for exposure of photoresists where suitable exposure wavelength is 375 nm. The majority of processing will occur on chips sized from 5 mm by 5 mm up to standard 4 inch diameter wafers, however we require that up to 5 x 5 inch substrates can fit into the system. The LBL system should have good support for mix-and-match lithography, i.e. well documented procedures for sharing CAD pattern libraries for straightforward implementation in mix-and-match exposures with the EBL system in lot 1. The system needs to be installed by the supplier. Prior references of supplying comparable systems are required.

Doc Title: LBL system

Contract Type: supplies
Document Type: Contract Notice
Reference Number: 49/02.03.00.00/2025
Contract Type: supplies
Authority Type: body-pl
Doc Title: LBL system
Dispatch Date: 2025-04-08
Publish Date: 2025-04-09
Submission Date: 2025-05-12

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