Large aperture high-vacuum compatible rotary stage Tender - 117479298

Procurement Summary

Country: USA

Summary: Large aperture high-vacuum compatible rotary stage

Deadline: 23 Apr 2025

Posting Date: 10 Apr 2025

Other Information

Notice Type: Tender

TOT Ref.No.: 117479298

Document Ref. No.: NIST-FY25-CHIPS-0079

Competition: ICB

Financier: Self Financed

Purchaser Ownership: Public

Tender Value: Refer Document

Purchaser's Detail

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Tender Details

Description
Notice ID Number NIST-FY25-CHIPS-0079
Title: Sources Sought Notice for large aperture high-vacuum compatible rotary stage
The purpose of this sources sought notice is to conduct market research and identify potential sources of commercial products/services that satisfy the Government-s anticipated needs.
BACKGROUND
The Nanoscale Device Characterization Division (NDCD) develops and advances the measurement and knowledge infrastructure to characterize nano- and atom-scale engineered materials and solid-state devices for innovation in information processing, sensing, and future quantum technologies. The NDCD-s technical activities span atom scale devices, nanoscale spectroscopy, advanced electronics, nanoscale processes and measurements, and alternative computing. To meet mission requirements, the NDCD needs to procure a large aperture high-vacuum compatible rotary stage as a component for a new experimental apparatus. This acquisition will allow the NDCD to expand its measurement capabilities using extreme-ultraviolet (EUV) diffractometry and EUV spectroscopic ellipsometry. The problem being solved by these EUV techniques is the non-destructive measurement of nanoscale patterned features in support of the American semiconductor industry.
While additional requirements are included below, there are three primary requirements for this large aperture high-vacuum compatible rotary stage. First, it must rotate a 3 kg mass along an arc of at least 135° about a central axis. In our EUV experiments, the EUV light is focused onto a sample of interest from a fixed source. The sample is rotated by a separate stage to change the grazing angle of incidence (theta); this separate “theta” stage is outside the scope of this Sources Sought. With a fixed source and rotating sample, the detector module must also be rotated an angle (2 theta) to measure the reflection and diffraction. For this apparatus, the positioning of the NIST-provided detector m...
Active Contract Opportunity

Notice ID : NIST-FY25-CHIPS-0079

Related Notice

Department/Ind. Agency : COMMERCE, DEPARTMENT OF

Sub-tier : NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY

Office: DEPT OF COMMERCE NIST

General Information

Contract Opportunity Type: Sources Sought (Original)

Original Published Date: Apr 09, 2025 04:20 pm EDT

Original Response Date: Apr 23, 2025 12:00 pm EDT

Inactive Policy: 15 days after response date

Original Inactive Date: May 08, 2025

Initiative: None
Classification

Original Set Aside:

Product Service Code: 6640 - LABORATORY EQUIPMENT AND SUPPLIES

NAICS Code: 334516 - Analytical Laboratory Instrument Manufacturing
Place of Performance: Gaithersburg, MD 20899 USA

Documents

 Tender Notice