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COMMERCE, DEPARTMENT OF | NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY has floated a tender for Large aperture high-vacuum compatible rotary stage. The project location is USA and the tender is closing on 23 Apr 2025. The tender notice number is NIST-FY25-CHIPS-0079, while the TOT Ref Number is 117479298. Bidders can have further information about the Tender and can request the complete Tender document by Registering on the site.
Procurement Summary
Country : USA
Summary : Large aperture high-vacuum compatible rotary stage
Deadline : 23 Apr 2025
Other Information
Notice Type : Tender
TOT Ref.No.: 117479298
Document Ref. No. : NIST-FY25-CHIPS-0079
Financier : Self Financed
Purchaser Ownership : Public
Tender Value : Refer Document
Purchaser's Detail
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Description
Notice ID Number NIST-FY25-CHIPS-0079
Title: Sources Sought Notice for large aperture high-vacuum compatible rotary stage
The purpose of this sources sought notice is to conduct market research and identify potential sources of commercial products/services that satisfy the Government-s anticipated needs.
BACKGROUND
The Nanoscale Device Characterization Division (NDCD) develops and advances the measurement and knowledge infrastructure to characterize nano- and atom-scale engineered materials and solid-state devices for innovation in information processing, sensing, and future quantum technologies. The NDCD-s technical activities span atom scale devices, nanoscale spectroscopy, advanced electronics, nanoscale processes and measurements, and alternative computing. To meet mission requirements, the NDCD needs to procure a large aperture high-vacuum compatible rotary stage as a component for a new experimental apparatus. This acquisition will allow the NDCD to expand its measurement capabilities using extreme-ultraviolet (EUV) diffractometry and EUV spectroscopic ellipsometry. The problem being solved by these EUV techniques is the non-destructive measurement of nanoscale patterned features in support of the American semiconductor industry.
While additional requirements are included below, there are three primary requirements for this large aperture high-vacuum compatible rotary stage. First, it must rotate a 3 kg mass along an arc of at least 135° about a central axis. In our EUV experiments, the EUV light is focused onto a sample of interest from a fixed source. The sample is rotated by a separate stage to change the grazing angle of incidence (theta); this separate “theta” stage is outside the scope of this Sources Sought. With a fixed source and rotating sample, the detector module must also be rotated an angle (2 theta) to measure the reflection and diffraction. For this apparatus, the positioning of the NIST-provided detector m...
Active Contract Opportunity
Notice ID : NIST-FY25-CHIPS-0079
Related Notice
Department/Ind. Agency : COMMERCE, DEPARTMENT OF
Sub-tier : NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY
Office: DEPT OF COMMERCE NIST
General Information
Contract Opportunity Type: Sources Sought (Original)
Original Published Date: Apr 09, 2025 04:20 pm EDT
Original Response Date: Apr 23, 2025 12:00 pm EDT
Inactive Policy: 15 days after response date
Original Inactive Date: May 08, 2025
Initiative: None
Classification
Original Set Aside:
Product Service Code: 6640 - LABORATORY EQUIPMENT AND SUPPLIES
NAICS Code: 334516 - Analytical Laboratory Instrument Manufacturing
Place of Performance: Gaithersburg, MD 20899 USA
Documents
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