Login
Login
Register
Complete Your Profile
Change Password
Request a Password Reset
Download Documents
Download Documents
Get Help to Participate in This Tender
Change Password
For better security, update the account password.
The COMMERCE, DEPARTMENT OF | NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY has issued a Tender notice for the procurement of a Hydrofluoric Acid Vapor Etcher in the USA. This Tender notice was published on 07 Apr 2026 and is scheduled to close on 21 Apr 2026, with an estimated Tender value of Refer Document. Interested bidders can access detailed Tender information, eligibility criteria, and complete bidding documents by referencing TOT Ref No. 139130024, while the tender notice number is NIST-SS26-102 and Registering on the platform.
Procurement Summary
Country: USA
Summary: Hydrofluoric Acid Vapor Etcher
Deadline: 21 Apr 2026
Posting Date: 07 Apr 2026
Other Information
Notice Type: Tender
TOT Ref.No.: 139130024
Document Ref. No.: NIST-SS26-102
Competition: ICB
Financier: Self Financed
Purchaser Ownership: Public
Tender Value: Refer Document
Purchaser's Detail
Name: Login to see tender_details
Address: Login to see tender_details
Email: Login to see tender_detailsLogin to see details Tender Details Notice ID Number: NIST-SS26-102 Documents
Title: Sources Sought Notice for Hydrofluoric Acid Vapor Etcher
The purpose of this sources sought notice is to conduct market research and identify potential sources of commercial products/services that satisfy the Government-s anticipated needs.
BACKGROUND
The Boulder Microfabrication Facility (BMF) is an ISO class 5 cleanroom that micro- and nano- fabricates devices to meet the NIST mission. Part of the required processing is using a Hydrofluoric Acid (HF) vapor etcher to etch films. The BMF currently has an HF vapor etcher that is used to process 100 mm substrates, and the BMF currently requires the ability to process up to 150 mm substrates.
Specific requirements for the HF vapor etcher are:
Must be made of materials compatible with HF
Must meet all industry safety requirements for storing, processing, and maintaining 48 % HF
Must be able to perform HF vapor etch as per semiconductor industry standards
Must use HF liquid, HF gas is not acceptable
Must be compatible for use in an ISO class 5 cleanroom.
Must be able to accommodate samples with sizes from chips to 150 mm SEMI spec wafers
Must be able to both mechanically clamp and secure substrates with an electrostatic chuck or holder.
Must be able to heat samples from ambient to 60 C with appropriate temperature control
Must be a tabletop unit that can fit into a standard size chemical fume hood.
Prototypes, one-off systems, demonstration models, used instruments, or refurbished instruments will not be considered for award.
HOW TO RESPOND TO THIS NOTICE
In responding to this notice, please DO NOT PROVIDE PROPRIETARY INFORMATION. Please include only the following information, readable in either Microsoft Word 365, Microsoft Excel 365, or .pdf format, in the response: Submit the response by email to the Primary Point of Contact and, if specified, to the Secondary Point of Contact listed in this notice as soon as possible, ...
Notice ID: nist-ss26-102
Department/Ind. Agency: commerce, department of
Sub-tier: national institute of standards and technology
Office: dept of commerce nist
Inactive Dates: may 06, 2026
Inactive Policy: 15 days after response date
Procurement Documents for USA
Access a comprehensive library of standard procurement documents specific to USA. Here, you'll find all the essential forms, guidelines, and templates required for tender applications and submissions in USA
Want To Bid in This Tender?
Get Local Agent Support in USA and 60 More Countries.
View Tenders By
Sign in with Google