High-Vacuum Chamber for Thin-Film Synthesis Tender - 128661132

Procurement Summary

Country: Finland

Summary: High-Vacuum Chamber for Thin-Film Synthesis

Deadline: 19 Nov 2025

Posting Date: 22 Oct 2025

Other Information

Notice Type: Tender

TOT Ref.No.: 128661132

Document Ref. No.: 697042-2025

Competition: ICB

Financier: Self Financed

Purchaser Ownership: Public

Tender Value: Refer Document

CPV Classification

38510000 - Microscopes

Purchaser's Detail

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Tender Details

The Helsinki Accelerator Laboratory (HAL) at the Department of Physics of the University of Helsinki (UH) is going to acquire a multi-source high vacuum (HV) chamber for thin-film deposition using magnetron sputtering. The magnetron sources will be capable of operating in direct-current magnetron sputtering (DCMS), radio-frequency magnetron sputtering (RFMS), and high-power impulse magnetron sputtering (HiPIMS) modes. Key feature of the deposition chamber will be the ability to accommodate and deposited homogeneously on substrates with diameter up to 8 inches (203.2 mm). A quick access port for loading and unloading substrates with a diameter up to 8 inches (203.2 nm) to the deposition chamber will be available. Moreover, the chamber design will allow provisionally for future functional expansion including installing a thermal evaporator for thin film deposition and a load-lock chamber for transferring samples to the deposition chamber without vacuum cycle interruption. RFMS and HiPIM power supplies, as well as instrumentation for thin film thermal evaporation, and load-lock chamber are not part of this tender. HAL is a leading materials science environment in Finland. The current research at HAL focuses on materials of importance for nanotechnology, micro- and optoelectronics, fusion technology, and particle detectors. Material properties are studied by applying various ion beam-based techniques, as well as by computational means. With regards to thin-film synthesis, the HAL...
Document Type: Contract Notice

Reference Number: 579907

Contract Type: supplies

Authority Type: body-pl

Doc Title: High-vacuum chamber for thin-film synthesis

Dispatch Date: 2025-10-20

Publish Date: 2025-10-22

Submission Date: 2025-11-19

Documents

 Tender Notice