Procurement Summary
Country : USA
Summary : Heating Vacuum Probe Station
Deadline : 16 Dec 2024
Other Information
Notice Type : Tender
TOT Ref.No.: 111050019
Document Ref. No. : NIST-SS25-CHIPS-0035
Financier : Self Financed
Purchaser Ownership : Public
Tender Value : Refer Document
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Description
Notice ID Number: NIST-SS25-CHIPS-0035
Title: Sources Sought Notice for Heating Vacuum Probe Station
The purpose of this sources sought notice is to conduct market research and identify potential sources of commercial products/services that satisfy the Government-s anticipated needs.
BACKGROUND
The Materials Measurement Science Division (MMSD) designs, fabricates, tests, and calibrates nanocalorimetry sensors for material development and process metrology for the semiconductor industry. An important aspect of this calibration procedure is the assessment of emissivity of the thin film stacks in the mid infrared wavelength range. To implement this, a high temperature probe station system is necessary. Samples include approximately 100 nm thick film stacks as blanket on solid wafers and patterned on released SiNx membranes that are approximately 100 nm thick.
NIST is seeking information from sources that may be capable of providing a solution that will achieve the objectives described above, in addition to the following essential requirements:
High temperature probe station system build-in heater element is required and can heat sample and sample mount up to 600°C or above. thermocouple probe that can be place in contact with the sample with closed loop temperature control. electrical probes are required to take four-point resistance measurements at room temperature and elevated temperature. IR transmittance window with a transmission of at least 60% from 1.0 µm to 5.0 µm. capable of being pumped to rough vacuum with a NIST supplied vacuum pump. samples (500 µm thick Si chips) must be held such that the free working distance of optics is less than 10 mm. are no automation requirements for the placement of probes or the positioning of samples—NIST is anticipating a manual probe station. probe station will be used under multiple NIST-owned microscopes. To meet this requirement, the probe station must weigh less than 5 kg and fit w...
Active Contract Opportunity
Notice ID : NIST-SS25-CHIPS-0035
Related Notice
Department/Ind. Agency : COMMERCE, DEPARTMENT OF
Sub-tier : NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY
Office: DEPT OF COMMERCE NIST
General Information
Contract Opportunity Type: Sources Sought (Original)
Original Published Date: Dec 02, 2024 02:24 pm EST
Original Response Date: Dec 16, 2024 12:00 pm EST
Inactive Policy: 15 days after response date
Original Inactive Date: Dec 31, 2024
Initiative: None
Classification
Original Set Aside:
Product Service Code: 6640 - LABORATORY EQUIPMENT AND SUPPLIES
NAICS Code: 334516 - Analytical Laboratory Instrument Manufacturing
Place of Performance: Gaithersburg, MD 20899 USA
Documents
Tender Notice