Login
Login
Register
Complete Your Profile
Change Password
Request a Password Reset
Download Documents
ENERGY, DEPARTMENT OF has floated a tender for Fiji G2 Plasma Ald System. The project location is USA and the tender is closing on 21 May 2024. The tender notice number is 4-B176-Q-00467-00, while the TOT Ref Number is 101304229. Bidders can have further information about the Tender and can request the complete Tender document by Registering on the site.
Procurement Summary
Country : USA
Summary : Fiji G2 Plasma Ald System
Deadline : 21 May 2024
Other Information
Notice Type : Tender
TOT Ref.No.: 101304229
Document Ref. No. : 4-B176-Q-00467-00
Competition : ICB
Financier : Self Financed
Purchaser Ownership : Public
Tender Value : Refer Document
Purchaser's Detail
Purchaser : ENERGY, DEPARTMENT OF
Contracting Office Address : Lemont, IL 60439
Primary Point of Contact : Molly Murtaugh
mmurtaugh@anl.gov
Phone Number 6302523094
USA
Email :mmurtaugh@anl.gov
Tender Details
Description
Argonne National Laboratory is seeking a Fiji Gen 2 Plasma ALD System with the following critical features:
Capable of deposition on 200 mm wafers. Can deposit high quality superconducting nitrides that have the following critical properties: (1) Low resistivity: (p(µOhm.cm) = 3.8K for TiN and = 13.8K for NbN. Remote plasma source with working distance of 25cm from substrate to enable ion-rich and radical rich conditions. Hot wall reactor with ability to integrate in-situ diagnostics such as ellipsometry, QCM and/or residual gas analyzer(RGA)/mass spectrometer(MS). Walltemperature of the reactor must be able to be independently controlled up to 300°C. System must have a single input into the chamber for precursors in order to maintain the shortest path length into the reactor; precursor inputs must be via a 3-way ALD valve, constantly purged with inert gas and manifolded into a single input point into the reactor. The plasma source must not require water cooling for the automatching network. A Seren RF power supply and matching network is strongly preferred. For minimized gas consumption the standard, recommended idle consumption of the system must be less than 60 sccm total gas flow of Ar/N2.Please provide the below no later than the offer deadline:
1. Completed and signed ANL-70 Request for Quotation (OK to include technical specifications on a separate proposal)
2. Completed and signed ANL-70B Pre-Award Information
3. Price justification as stated in ANL-70 Request for Quotation document
4. Country of Origin confirmation
Active Contract Opportunity Notice ID 4-B176-Q-00467-00 Related Notice Department/Ind. Agency ENERGY, DEPARTMENT OF Sub-tier ENERGY, DEPARTMENT OF Office ARGONNE NATL LAB - DOE CONTRACTOR
General Information
Contract Opportunity Type: Solicitation (Original)
All Dates/Times are: (UTC-05:00) CENTRAL STANDARD TIME, CHICAGO, USA
Original Published Date: May 15, 2024 11:30 am CDT
Original Date Offers Due: May 21, 2024 12:00 pm CDT
Inactive Policy: Manual
Original Inactive Date: May 21, 2024
Initiative: None
Classification
Original Set Aside:
Product Service Code: 6640 - LABORATORY EQUIPMENT AND SUPPLIES
NAICS Code: 423490 - Other Professional Equipment and Supplies Merchant Wholesalers
Place of Performance: Lemont, IL 60439 USA
Documents
ANL-70-Request-for-Quotation.doc
Want To Bid in This Tender?
Get Local Agent Support in USA and 60 More Countries.
View Tenders By
Sign in with Google