Procurement Summary
Country : USA
Summary : Electron Multiplication Charge Coupled Device (EMCCD) camera
Deadline : 04 Jul 2025
Other Information
Notice Type : Tender
TOT Ref.No.: 121297525
Document Ref. No. : NIST-FY25-CHIPS-0091
Financier : Self Financed
Purchaser Ownership : Public
Tender Value : Refer Document
Purchaser's Detail
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Description
Title: Sources Sought Electron Multiplication Charge Coupled Device (EMCCD) camera NIST-FY25-CHIPS-0091
The National Institute of Standards and Technology (NIST) is seeking information from sources that may be capable of providing a Detector and spectrograph for optical emission spectroscopy. The North American Industry Classification System (NAICS) code for this acquisition is 334516.
BACKGROUND
The CHIPS RF Waveform and Rapid Frequency Comb Diagnostics for Plasma Etching Project (5.04) was undertaken to identify methods to improve efficiencies of plasma etching processes. One aspect of this project involves development and application of in situ optical diagnostics capable of characterizing plasma chemistry, including dilute species. One optical technique that meets the needs of this project is optical emission spectroscopy (OES). To perform OES measurements, Group 646.05 needs to procure a detector, a spectrograph, and control/data analysis software. Since dilute species will emit weak signals in (low pressure) plasma etch processes, the detector must have ultra-low noise characteristics as well as a high gain and the spectrograph must be designed with high light collection efficiency while being capable of achieving good spectral resolution. In addition, since many species of interest emit radiation in the ultraviolet to visible spectral range, the detector and spectrograph need to be sensitive in the 200 nm to 700 nm spectral range, while maximizing detector quantum efficiency in the 200 nm to 400 nm range. Also, since the area between the electrodes in the chamber will need to be imaged to characterize spatial uniformity in the plasma, the detector needs to be a camera with an approximately square sensor area and the spectrograph needs to be designed for imaging with a large focal plane area and low optical aberrations. Additionally, high-precision (1 microsecond) hardware time stamping is needed to synchronize detector data w...
Active Contract Opportunity
Notice ID : NIST-FY25-CHIPS-0091
Related Notice
Department/Ind. Agency : COMMERCE, DEPARTMENT OF
Sub-tier : NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY
Office: DEPT OF COMMERCE NIST
General Information
Contract Opportunity Type: Sources Sought (Original)
Original Published Date: Jun 20, 2025 04:39 pm EDT
Original Response Date: Jul 04, 2025 12:00 pm EDT
Inactive Policy: 15 days after response date
Original Inactive Date: Jul 19, 2025
Initiative: None
Classification
Original Set Aside:
Product Service Code: 6640 - LABORATORY EQUIPMENT AND SUPPLIES
NAICS Code: 334516 - Analytical Laboratory Instrument Manufacturing
Place of Performance: Gaithersburg, MD 20899 USA
Documents
Tender Notice