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FEDERAL POLYTECHNIC SCHOOL OF LAUSANNE (EPFL) has floated a tender for Eine Sputtering-anlage Ecole Polytechnique Fédérale De Lausanne (epfl) Laboratory of Photonic and Quantum Measurements (lpqm). The project location is Switzerland and the tender is closing on 09 Oct 2023. The tender notice number is 1359193, while the TOT Ref Number is 88004897. Bidders can have further information about the Tender and can request the complete Tender document by Registering on the site.
Procurement Summary
Country : Switzerland
Summary : Eine Sputtering-anlage Ecole Polytechnique Fédérale De Lausanne (epfl) Laboratory of Photonic and Quantum Measurements (lpqm)
Deadline : 09 Oct 2023
Other Information
Notice Type : Tender
TOT Ref.No.: 88004897
Document Ref. No. : 1359193
Financier : Self Financed
Purchaser Ownership : Public
Tender Value : Refer Document
Purchaser's Detail
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Login to see detailsTender Details
Epfl intends to acquire a sputtering facility for its Center of Micronanotechnology (CMI) in 2023-2024 Quantum Electrodynamics And Quantum Optomechanics Used :•Magnetron Sputtering Of Superconducting Films Focusing On The Following Criteria:Ouniformity At 100mm Wafer Scaleability To Sputter Two Types Of Materials Without Breaking Vacuum•Static Oxidation In Loadlock Or A Specialized Oxidation Chamber After Deposition Of Metal Films Or Printing Should Can Reach 0.05 Mbar To 10 Mbar•Ion Source For Sample Preparation
Requirement office/Awarding office: Ecole Polytechnique Fédérale de Lausanne (EPFL) Procurement office/organizer: Ecole Polytechnique Fédérale de Lausanne (EPFL) Laboratory of photonic and quantum measurements (LPQM), attn. by Professor Tobias J. Kippenberg, Bâtiment PH - Station 03, 1015 Lausanne, Switzerland, email: marco.scigliuzzo@epfl.ch
Publish Date:29.08.2023
Procurement object
2.1 Type of delivery order: purchase
2.2 Project title of procurement: A sputtering system
2.3 File number / project number: 2321-23851
2.4 Division into lots?: No
2.5 Community Vocabulary:
2.6 Object and scope of the contract: EPFL intends to acquire a sputtering facility for its Center of MicroNanotechnology (CMi) in 2023-2024 for parametric traveling wave amplifiers and superconducting resonators for quantum electrodynamics and quantum optomechanics :•Magnetron sputtering of superconducting layers with emphasis on the following criteria:oConformity at 100 mm wafer scaleoAbility to sputter two types of materials without breaking the vacuum•Static oxidation in the loadlock or a special one Oxidation chamber after deposition of metal layers or pressure should be able to reach 0.05 mBar to 10 mBar•Ion source for sample preparation
2.7 Place of delivery: See specifications.
2.8 Duration of the contract...
Documents
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