Procurement Summary
Country: USA
Summary: Combined Ssnnoi Notice of Intent to Noncompetitively Acquire Tilt Stage for Sem
Deadline: 29 May 2026
Posting Date: 16 May 2026
Other Information
Notice Type: Tender
TOT Ref.No.: 141394736
Document Ref. No.: NIST-SS26-CHIPS-120
Competition: ICB
Financier: Self Financed
Purchaser Ownership: Public
Tender Value: Refer Document
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Tender Details
THIS IS A COMBINED SOURCES SOUGHT NOTICE AND NOTICE OF INTENT TO SOLE SOURCE
Announcement Number: NIST-SS26-CHIPS-120
Subject: Notice of Intent to Noncompetitively Acquire Tilt Stage for SEM
This notice is not a request for a quotation. A solicitation document will not be issued, and quotations will not be requested.
This acquisition is being conducted under the authority of RFO 12.102(a). The North American Industry Classification System (NAICS) code for this acquisition is 334516, Analytical Laboratory Instrument Manufacturing.
NIST intends to award a non-competitive contract to Kleindiek, Inc. for a tilt stage for NIST-s Zeiss Supra SEM.
BACKGROUND
The National Institute of Standards and Technology (NIST) Microsystems and Nanotechnology Division (MND) develops integrated microsystems by advancing the state of the art in nanofabrication, enabling the transfer of NIST measurement technologies to the industrial, academic, and government communities.
The MND owns a Zeiss Supra SEM that serves CHIPS Metrology project GC6.01 - Universal Microscopy Standards. To meet mission-critical requirements, the MND needs to procure a tilt-stage upgrade for this microscope. This acquisition will provide the Division and CHIPS Metrology with essential capabilities for calibration and measurement method development, assessment of nanofabrication processes, and characterization of microscopy standards.
Scanning electron microscopy (SEM) is a critical tool for semiconductor manufacturing metrology. NIST is developing standards and methods for calibrating the landing angle of an electron beam in scanning electron microscopy. Such calibration is critical to ensure dimensional accuracy for a variety of metrology applications, such as overlay assessment. The standards consist of arrays of nanostructures, the images of which exhibit features that depend on the relative angle of the electron beam and the sample, and the nanostructure geometry. The realization of s...
Notice ID: nist-ss26-chips-120
Department/Ind. Agency: commerce, department of
Sub-tier: national institute of standards and technology
Office: dept of commerce nist
Product Service Code: 6640 - laboratory equipment and supplies
NAICS Code: 334516 - Analytical Laboratory Instrument Manufacturing
Inactive Dates: jun 13, 2026
Inactive Policy: 15 days after response date
Documents
Tender Notice