Chips Rd Beamline Residual Gas Analyzer Combined Tender - 141578768

Procurement Summary

Country: USA

Summary: Chips Rd Beamline Residual Gas Analyzer Combined Sources Soughtnotice of Intent to Sole Source

Deadline: 01 Jun 2026

Posting Date: 19 May 2026

Other Information

Notice Type: Tender

TOT Ref.No.: 141578768

Document Ref. No.: NIST-SS26-CHIPS-124

Competition: ICB

Financier: Self Financed

Purchaser Ownership: Public

Tender Value: Refer Document

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Tender Details

***THIS IS A COMBINED SOURCES SOUGHT NOTICE AND NOTICE OF INTENT TO SOLE SOURCE***
The National Institute of Standards and Technology (NIST) is seeking information from sources that may be capable of providing a high speed, Lock-in/Servo system. If no alternate sources are identified, the Government intends to issue a Sole Source Award to Newport Corp, 31950 Frontage RD, Bozeman, Montana, 59715 (UEI: EP8ZPBVV6RL4) under the authority of FAR 12.102(b) The North American Industry Classification System (NAICS) code for this acquisition is 334516.
NIST has a need for a Beamline Residual Gas Analyzer that meets or exceeds the following draft minimum specifications:
BACKGROUND
The National Institute of Standards and Technology (NIST), Physical Measurements Laboratory (PML) Sensor Science Division-s, Optical Radiation Group is improving NIST-s capability to provide calibration measurements of mirror reflectivity and detector responsivity in the extreme ultraviolet region. These programs support both the EUV Lithography technology currently deployed in semiconductor fabs and industry-s “Beyond EUV” research programs that will develop the next generation of lithography processes at shorter wavelengths. The CHIPS-Metrology program 2.13 “Reflectometry and Detector Calibrations at SURF III Supporting the Future of EUVL” will improve the uncertainty and availability of these measurements by designing, fabricating, and installing two new beamlines at NIST-s SURF III synchrotron radiation facility.
Beamlines on the SURF III synchrotron radiation facility must meet rigorous criteria for the composition of the residual gas, ensuring a clean, ultra-high vacuum system. These RGA units are required to analyze the residual gas composition and quantify the amount of high molecular mass species. Meeting these vacuum criteria is critical to protect both the SURF III accelerator system and the individual beamline. High mass components in the residual gas will contaminate the...
Notice ID: nist-ss26-chips-124

Department/Ind. Agency: commerce, department of

Sub-tier: national institute of standards and technology

Office: dept of commerce nist

Product Service Code: 6640 - laboratory equipment and supplies

NAICS Code: 334513 - Instruments and Related Products Manufacturing for Measuring, Displaying, and Controlling Industrial Process Variables

Inactive Dates: jun 16, 2026

Inactive Policy: 15 days after response date

Documents

 Tender Notice