Advanced Photolithographic Laser Writer Tender, Canada - 100616028

Procurement Summary

Country : Canada

Summary : Advanced Photolithographic Laser Writer

Deadline : 17 May 2024

Other Information

Notice Type : Tender

TOT Ref.No.: 100616028

Document Ref. No. : UOT202416970

Competition : ICB

Financier : Self Financed

Purchaser Ownership : Public

Tender Value : Refer Document

Purchaser's Detail

Purchaser : UNIVERSITY OF TORONTO - ST. GEORGE CAMPUS - PROCUREMENT SERVICES
Toronto, ON, CAN
Contact Information : Renee Cheng, 000-000-0000, reneeke.cheng@utoronto.ca
Canada
Email :reneeke.cheng@utoronto.ca

Tender Details

Notice of Intended ProcurementNAME OF PROCURING ENTITYThe Governing Council of the University of Toronto (the “University”)CONTACT PERSON AND CONTRACT PERSON COORDINATESRenee Cheng215 Huron Street, 3rd FloorToronto, ON M5S 1A2reneeke.cheng@utoronto.caPROCUREMENT DOCUMENTSThe procurement documents are available at www.merx.com. Note that obtaining access to the procurement documents will require prospective suppliers to register and pay a registration fee. Pricing and Payment Terms are available on the MERX website.DESCRIPTION OF PROCUREMENTThe University is conducting an RFP for Advanced Photolithographic Laser WriterThe Toronto Nanofabrication Center (TNFC) is the University-s central micro- and nanofabrication facility, serving academic research and development needs, as well as training functions. Advanced tools for MEMS and nanophotonics will enable the TNFC to conduct active interdisciplinary research.The Center intends to acquire an Advanced Photolithographic Laser Writer from a proponent that demonstrates its ability to the supply, implement and provide continued customer service related to the system. This tool will serve the role to complement the TNFC-s existing EBPG5000+ Electron Beam Pattern Generator which has a capability of achieving pattern resolution down to 7 nm. It should offer exceptional performance for resolving micron-sized features, grayscale exposure, as well as the aligned exposure up to 6-inch wafer. It will be installed at TNFC-s new Pratt Cleanroo...
Solicitation Type : RFP - Request for Proposal (Formal)
Reference Number : 0000269181
Location : Canada, Ontario, Toronto
Purchase Type : Duration: 1 year Option: One year extension option
Description : Notice of Intended ProcurementNAME OF PROCURING ENTITYThe Governing Council of the University of Toronto (the “University”)CONTACT PERSON AND CONTRACT PERSON COORDINATESRenee Cheng215 Huron Street, 3rd FloorToronto, ON M5S 1A2reneeke.cheng@utoronto.caPROCUREMENT DOCUMENTSThe procurement documents are available at www.merx.com. Note that obtaining access to the procurement documents will require prospective suppliers to register and pay a registration fee. Pricing and Payment Terms are available on the MERX website.DESCRIPTION OF PROCUREMENTThe University is conducting an RFP for Advanced Photolithographic Laser WriterThe Toronto Nanofabrication Center (TNFC) is the University’s central micro- and nanofabrication facility, serving academic research and development needs, as well as training functions. Advanced tools for MEMS and nanophotonics will enable the TNFC to conduct active interdisciplinary research.The Center intends to acquire an Advanced Photolithographic Laser Writer from a proponent that demonstrates its ability to the supply, implement and provide continued customer service related to the system. This tool will serve the role to complement the TNFC’s existing EBPG5000+ Electron Beam Pattern Generator which has a capability of achieving pattern re...

Documents

 Tender Notice