Procurement Summary
Country : Switzerland
Summary : A Sputter Deposition System Ecole Polytechnique Fédérale De Lausanne (epfl) Laboratory of Photonic and Quantum Measurements (lpqm)
Deadline : 09 Oct 2023
Other Information
Notice Type : Tender
TOT Ref.No.: 88004898
Document Ref. No. : 1359187
Financier : Self Financed
Purchaser Ownership : Public
Tender Value : Refer Document
Purchaser's Detail
Name :Login to see tender_details
Address : Login to see tender_details
Email : Login to see tender_details
Login to see detailsTender Details
In 2023-2024, epfl intends to acquire a sputtering deposition system for its cleanroom Cmi center. The equipment will be dedicated to advanced research on Josephson Nb/Al-Alox/ Nb For Parametric Traveling Wave Amplifiers And Superconducting Resonators For Quantum Circuit Electrodynamics And Quantum Circuit Optomechanics:• Magnetron Sputtering Of Superconducting Films With Emphasis On The Following Criteria:O D-Scale Uniformity a 100 mmo wafer Be able to spray two types of materials without breaking the vacuum • Static oxidation in the loading lock or in a dedicated oxidation chamber after the deposition of metallic layerso The pressure must be able to reach 0.05 Mbar to 10 Mbar • Ion Source for Sample Preparation
Applicant department/Contracting entity: Ecole Polytechnique Fédérale de Lausanne (EPFL)Organizing department/Organizing entity: Ecole Polytechnique Fédérale de Lausanne (EPFL)Laboratory of photonic and quantum measurements (LPQM), for the attention of Professor Tobias J. Kippenberg, Building PH - Station 03, 1015 Lausanne, Switzerland, E-mail: marco.scigliuzzo@epfl.ch
Publish Date:29.08.2023
Object of the contract
2.1 Type of Supply Market: Purchase
2.2 Project Title of the Market: A Sputter Deposition System 2.3 Reference / project number: 2321-23851
2.4 Contract divided into lots?: No
2.5 Common Procurement Vocabulary:
2.6 Purpose and scope of the contract: In 2023-2024, EPFL intends to acquire a sputtering deposition system for its CMi Center in a clean room. The equipment will be dedicated to advanced research on junctions Josephson Nb/Al-AlOx/Nb for traveling wave parametric amplifiers and superconducting resonators for circuit quantum electrodynamics and circuit quantum optomechanics:• Magnetron sputtering of superconducting films with emphasis on the following criteria: o uniformity on the scale of a 100mm wafer be able to sputter two types of materials without breaking the vacuum• Static oxidation in the loading lock or in a dedicated oxidation chamber after the deposition of metallic layerso the pressure must for...
Documents
Tender Notice