A 300mm Wafer Compatible, Multi-chamber Pvd Platform Tender, Belgium - 86064052

Procurement Summary

Country : Belgium

Summary : A 300mm Wafer Compatible, Multi-chamber Pvd Platform

Deadline : 21 Aug 2023

Other Information

Notice Type : Tender

TOT Ref.No.: 86064052

Document Ref. No. : IMEC VZW-300 MM WAFER-COMPATIBEL PVD-PLATFORM MET MEERDERE KAMERS -F02

Financier : Self Financed

Purchaser Ownership : Public

Tender Value : Refer Document

Purchaser's Detail

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Tender Details

Greater than, or equal to, 9 process chambers must be supported on a single platform. These modules, including any robot transfer modules, must be capable of ultra-high vacuum (/= 4) PVD chamber with a combination of RF and/or DC and/or pulsed DC cathodes capable of a minimum of 2-target co-sputtering with high-temperature heating capability, 2) a pre-clean chamber to remove native oxides and other contaminants, 3) in-situ high temperature anneal chamber (600C) capable of injecting reactive gases e.g. O2 and N2, 4) single-cathode PVD chamber with heating capability capable of high deposition rates (1nm/s) and, 5) cooling chamber (100k). the platform must be compatible with front opening universal pods with a 25-slot capacity, including an equipment front end module and load-lock system for wafer loading. finally, the deposition must be computer controlled and automated following defined recipes. as an optional, the platform should be compatible with automatic recipe upload from fab management software via a standardized protocol, for example secs/gem
Type de procédure : Competitive procedure with negotiation
Contract type : Supplies
Tenders submission deadline : 21/08/2023

Documents

 Tender Notice